Layered chip package with wiring on the side surfaces

ABSTRACT

A layered chip package has a main body including pairs of layer portions, and wiring disposed on a side surface of the main body. Each layer portion includes a semiconductor chip. The pairs of layer portions include at least one specific pair of layer portions including a first-type layer portion and a second-type layer portion. The first-type layer portion includes electrodes each connected to the semiconductor chip and each having an end face located at the side surface of the main body on which the wiring is disposed, whereas the second-type layer portion does not include such electrodes. A layered substructure formed of a stack of two substructures, each of which includes aligned preliminary layer portions, is used to fabricate a stack of a predetermined two or greater number of pairs of layer portions, and the main body is fabricated by stacking an additional first-type layer portion together with the stack, the number of the additional first-type layer portion being equal to the number of the specific pair(s) of layer portions included in the stack.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a layered chip package including aplurality of chips stacked, and to a method of manufacturing the same.

2. Description of the Related Art

In recent years, a reduction in weight and an improvement in performancehave been demanded of mobile devices typified by cellular phones andnotebook personal computers. Accordingly, there has been a demand forhigher integration of electronic components for use in mobile devices.Higher integration of electronic components has been demanded also forachieving an increase in capacity of semiconductor memory.

As an example of highly integrated electronic components, asystem-in-package (hereinafter referred to as SiP), especially an SiPutilizing a three-dimensional packaging technology for stacking aplurality of chips, has attracting attention in recent years. In thepresent application, a package including a plurality of chips stacked iscalled a layered chip package. Since the layered chip package allows areduction in wiring length, it provides the advantage of allowing ahigher operation speed for a circuit and a reduction in straycapacitance of wiring, as well as the advantage of allowing higherintegration.

Major examples of three-dimensional packaging technology for fabricatinga layered chip package include a wire bonding method and a throughelectrode method. According to the wire bonding method, a plurality ofchips are stacked on a substrate and a plurality of electrodes formed oneach chip are connected, by wire bonding, to external connectingterminals formed on the substrate. According to the through electrodemethod, a plurality of through electrodes are formed in each of chips tobe stacked and inter-chip wiring is performed through the use of thethrough electrodes.

The wire bonding method has a problem that it is difficult to reduce thedistance between the electrodes so as to avoid contact between wires,and a problem that high resistances of the wires hamper a high-speedoperation of a circuit.

The through electrode method is free from the above-mentioned problemsof the wire bonding method. Unfortunately, however, the throughelectrode method requires a large number of steps for forming thethrough electrodes in chips, and consequently increases the cost for thelayered chip package. According to the through electrode method, formingthe through electrodes in chips requires a series of steps as follows:forming a plurality of holes for the plurality of through electrodes ina wafer that will be cut later into a plurality of chips; forming aninsulating layer and a seed layer in the plurality of holes and on thetop surface of the wafer; forming a plurality of through electrodes byfilling the plurality of holes with metal such as Cu by plating; andremoving unwanted portions of the seed layer.

According to the through electrode method, the through electrodes areformed by filling metal into holes having relatively high aspect ratios.Consequently, voids or keyholes are prone to occur in the throughelectrodes due to poor filling of the holes with metal, so that thereliability of wiring formed by the through electrodes tends to bereduced.

According to the through electrode method, an upper chip and a lowerchip are physically joined to each other by connecting the throughelectrodes of the upper and lower chips by means of, for example,soldering. The through electrode method therefore requires that theupper and lower chips be accurately aligned and then joined to eachother at high temperatures. When the upper and lower chips are joined toeach other at high temperatures, however, misalignment between the upperand lower chips can occur due to expansion and contraction of the chips,which often results in electrical connection failure between the upperand lower chips.

U.S. Pat. No. 5,953,588 discloses a method of manufacturing a layeredchip package as described below. In this method, a plurality of chipscut out from a processed wafer are embedded into an embedding resin andthen a plurality of leads are formed to be connected to each chip,whereby a structure called a neo-wafer is fabricated. Next, theneo-wafer is diced to form a plurality of structures each called aneo-chip. Each neo-chip includes: one or more chips; resin surroundingthe chip(s); and a plurality of leads. The plurality of leads connectedto each chip each have an end face exposed at a side surface of theneo-chip. Next, a plurality of kinds of neo-chips are laminated into astack. In the stack, the respective end faces of the plurality of leadsconnected to the chips of each layer are exposed at the same sidesurface of the stack.

Keith D. Gann, “Neo-Stacking Technology”, HDI Magazine, December 1999,discloses fabricating a stack by the same method as U.S. Pat. No.5,953,588, and forming wiring on two side surfaces of the stack.

The manufacturing method disclosed in U.S. Pat. No. 5,953,588 involves anumber of process steps and this raises the cost for the layered chippackage. According to this method, after the plurality of chips cut outfrom a processed wafer are embedded into the embedding resin, theplurality of leads are formed to be connected to each chip to therebyfabricate the neo-wafer, as described above. Accurate alignment of theplurality of chips is therefore required when fabricating the neo-wafer.This is also a factor that raises the cost for the layered chip package.

U.S. Pat. No. 7,127,807 B2 discloses a multilayer module formed bystacking a plurality of active layers each including a flexible polymersubstrate with at least one electronic element and a plurality ofelectrically-conductive traces formed within the substrate. According tothis multilayer module, however, it is impossible to increase theproportion of the area occupied by the electronic element in each activelayer, and consequently it is difficult to achieve higher integration.

For a wafer to be cut into a plurality of chips, the yield of the chips,that is, the rate of non-defective chips with respect to all chipsobtained from the wafer, is 90% to 99% in many cases. Since a layeredchip package includes a plurality of chips, the rate of layered chippackages in which all of the plurality of chips are non-defective islower than the yield of the chips. The larger the number of chipsincluded in each layered chip package, the lower the rate of layeredchip packages in which all of the chips are non-defective.

A case will now be considered where a memory device such as a flashmemory is formed using a layered chip package. In general, a redundancytechnique of replacing a defective column of memory cells with aredundant column of memory cells is employed in a memory device such asa flash memory so that the memory device can normally function even whensome memory cells are defective. In the case where a memory device isformed using a layered chip package, the redundancy technique is alsoemployable to make it possible that, even if some of memory cellsincluded in any chip are defective, the memory device can normallyfunction while using the chip including the defective memory cells.However, if, for example, a chip that includes a control circuit and aplurality of memory cells has become defective due to a wiring failurein the control circuit and cannot function normally even by employingthe redundancy technique, this defective chip is unusable. In this case,replacing the defective chip with a non-defective one raises the costfor the layered chip package.

US 2007/0165461 A1 discloses a technique of identifying one or moredefective flash memory dies in a flash memory device having a pluralityof flash memory dies, and disabling memory access operations to eachidentified die.

The technique disclosed in US 2007/0165461 A1 is applicable to the casewhere a memory device is formed using a layered chip package, so thatone or more defective chips included in the layered chip package can beidentified and disabled.

However, disabling a defective chip in a layered chip package involves aproblem as described below. A layered chip package has wiring forconnecting each chip to a plurality of terminals of the layered chippackage. Even if a defective chip is disabled, there exists wiring thatconnects the defective chip to a plurality of terminals of the layeredchip package. The wiring connecting the defective chip to the pluralityof terminals of the layered chip package generates a capacitance orinductance that is unwanted for a device implemented by the layered chippackage, such as a memory device, and/or generates a stray capacitancebetween itself and other wiring connected to non-defective chips. Thisis a hindrance to increasing the operation speed of the device such asthe memory device.

In addition, if a layered chip package including a predetermined numberof chips is able to implement a memory device having a desired memorycapacity when all the chips included in the layered chip package arenon-defective, it is impossible to implement the memory device havingthe desired memory capacity by simply disabling a defective chipincluded in the layered chip package.

OBJECT AND SUMMARY OF THE INVENTION

It is an object of the present invention to provide a layered chippackage and its manufacturing method that make it possible to implement,at low cost, a layered chip package including a plurality of chipsstacked, the layered chip package being capable of disabling the use ofa malfunctioning chip while reducing problems attributable to wiringconnected to the malfunctioning chip, and also capable of performingequally well irrespective of whether a malfunctioning chip is includedor not.

A layered chip package manufactured by a method of manufacturing alayered chip package according to the present invention includes: a mainbody having a top surface, a bottom surface and four side surfaces; andwiring disposed on at least one of the side surfaces of the main body.The main body includes a plurality of pairs of layer portions stacked,each of the plurality of pairs consisting of two layer portions stacked.The plurality of pairs of layer portions include at least one specificpair of layer portions, the specific pair of layer portions consistingof a first-type layer portion and a second-type layer portion. Each ofthe first-type layer portion and the second-type layer portion includesa semiconductor chip. The semiconductor chip included in the first-typelayer portion is a normally functioning one whereas the semiconductorchip included in the second-type layer portion is a malfunctioning one.The first-type layer portion further includes a plurality of electrodes,each of the plurality of electrodes being connected to the semiconductorchip and having an end face located at the at least one of the sidesurfaces of the main body on which the wiring is disposed, whereas thesecond-type layer portion does not include any electrode connected tothe semiconductor chip and having an end face located at the at leastone of the side surfaces of the main body on which the wiring isdisposed. The wiring is connected to the end face of each of theplurality of electrodes.

The method of manufacturing a layered chip package according to thepresent invention includes the steps of: fabricating a layeredsubstructure by stacking two substructures each of which includes aplurality of preliminary layer portions aligned, each of the preliminarylayer portions being intended to become any one of the layer portionsincluded in the main body, the substructures being intended to be cutlater at a boundary between every adjacent two of the preliminary layerportions; fabricating a pre-main-body stack by using the layeredsubstructure, the pre-main-body stack being a stack of a predeterminedtwo or greater number of pairs of layer portions including the at leastone specific pair of layer portions; fabricating the main body bystacking at least one additional first-type layer portion together withthe pre-main-body stack, the number of the at least one additionalfirst-type layer portion being equal to the number of the at least onespecific pair of layer portions included in the pre-main-body stack; andcompleting the layered chip package by forming the wiring on the mainbody.

The step of fabricating the layered substructure includes, as a seriessteps for fabricating each substructure, the step of fabricating apre-substructure wafer including a plurality of pre-semiconductor-chipportions aligned; the step of distinguishing between a normallyfunctioning pre-semiconductor-chip portion and a malfunctioningpre-semiconductor-chip portion among the plurality ofpre-semiconductor-chip portions included in the pre-substructure wafer;and the step of forming the plurality of electrodes so as to beconnected to the normally functioning pre-semiconductor-chip portion,without forming any electrode connected to the malfunctioningpre-semiconductor-chip portion and having an end face located at the atleast one of the side surfaces of the main body on which the wiring isdisposed.

In the method of manufacturing a layered chip package according to thepresent invention, the predetermined two or greater number may be four.

In the method of manufacturing a layered chip package according to thepresent invention, the semiconductor chip may have four side surfaces,and each of the plurality of layer portions may further include aninsulating portion covering at least one of the four side surfaces ofthe semiconductor chip. In this case, the insulating portion may have atleast one end face located at the at least one of the side surfaces ofthe main body on which the wiring is disposed, and the end face of eachof the plurality of electrodes may be surrounded by the insulatingportion.

In the method of manufacturing a layered chip package according to thepresent invention, in the step of fabricating the main body, the mainbody may be fabricated by stacking at least one additional specific pairof layer portions together with the pre-main-body stack, the number ofthe at least one additional specific pair of layer portions being equalto the number of the at least one specific pair of layer portionsincluded in the pre-main-body stack. In this case, in the step offabricating the main body, one of the at least one additional specificpair of layer portions stacked with the pre-main-body stack may bedisposed closest to the top surface or the bottom surface of the mainbody among the plurality of pairs of layer portions included in the mainbody. The layered chip package may further include a plurality ofterminals disposed on one of the top surface and the bottom surface ofthe main body, and the wiring may be connected to the plurality ofterminals. The method of manufacturing a layered chip package mayfurther include the step of forming the plurality of terminals performedbefore the step of completing the layered chip package. In this case, inthe step of fabricating the main body, one of the at least oneadditional specific pair of layer portions stacked with thepre-main-body stack may be disposed farthest from the surface of themain body on which the plurality of terminals are disposed, among theplurality of pairs of layer portions included in the main body.

In the method of manufacturing a layered chip package according to thepresent invention, in the step of fabricating the main body, one of theat least one additional first-type layer portion stacked with thepre-main-body stack may be disposed closest to the top surface or thebottom surface of the main body among the plurality of pairs of layerportions included in the main body.

The layered chip package may further include a plurality of terminalsdisposed on one of the top surface and the bottom surface of the mainbody, and the wiring may be connected to the plurality of terminals. Themethod of manufacturing the layered chip package may further include thestep of forming the plurality of terminals performed before the step ofcompleting the layered chip package. In this case, in the step offabricating the main body, one of the at least one additional first-typelayer portion stacked with the pre-main-body stack may be disposedfarthest from the surface of the main body on which the plurality ofterminals are disposed, among the plurality of pairs of layer portionsincluded in the main body. Alternatively, the step of fabricating themain body and the step of forming the plurality of terminals may beperformed simultaneously by stacking the at least one additionalfirst-type layer portion with the plurality of terminals integratedtherewith, together with the pre-main-body stack.

In the method of manufacturing a layered chip package according to thepresent invention, the step of fabricating the pre-main-body stack mayinclude the steps of: fabricating at least one bar by cutting thelayered substructure, the at least one bar including a plurality ofportions each of which is to become any one of the plurality of pairs oflayer portions included in the main body, the plurality of portionsbeing aligned in one direction orthogonal to a stacking direction of thelayer portions; cutting the at least one bar so as to form a pluralityof pairs of layer portions, each of the plurality of pairs beingintended to become any one of the plurality of pairs of layer portionsincluded in the main body; and completing the pre-main-body stack bystacking the predetermined two or greater number of pairs of layerportions.

In the method of manufacturing a layered chip package according to thepresent invention, the step of fabricating the pre-main-body stack mayinclude the steps of: fabricating a plurality of bars by cutting thelayered substructure, each of the plurality of bars including aplurality of portions each of which is to become any one of theplurality of pairs of layer portions included in the main body, theplurality of portions being aligned in one direction orthogonal to thestacking direction of the layer portions; fabricating a bar stack bystacking two or more of the bars, the number of the bars to be stackedbeing equal to the predetermined two or greater number, the bar stackincluding a plurality of portions each of which is to become thepre-main-body stack, the plurality of portions being aligned in onedirection orthogonal to the stacking direction of the layer portions;and completing the pre-main-body stack by cutting the bar stack.

In the method of manufacturing a layered chip package according to thepresent invention, the step of fabricating the pre-main-body stack mayinclude the steps of: fabricating a stack aggregate by stacking a numberof layered substructures, the number of the layered substructures to bestacked being equal to the predetermined two or greater number, thestack aggregate including a plurality of portions each of which is tobecome the pre-main body stack, the plurality of portions being alignedin one direction orthogonal to the stacking direction of the layerportions; and completing the pre-main-body stack by cutting the stackaggregate.

In the method of manufacturing a layered chip package according to thepresent invention, the step of forming the plurality of electrodes mayinclude the steps of: forming a photoresist layer for use for formingthe plurality of electrodes, the photoresist layer including a pluralityof portions that respectively correspond to all of thepre-semiconductor-chip portions; forming a frame by patterning thephotoresist layer by photolithography, the frame having a plurality ofgrooves to later accommodate the plurality of electrodes; and formingthe plurality of electrodes in the grooves of the frame. In this case,in the step of forming the plurality of electrodes in the grooves of theframe, the plurality of electrodes may be formed by plating.

The step of forming the frame may include an exposure step of exposingthe photoresist layer such that a latent image corresponding to theplurality of electrodes is formed on a portion of the photoresist layercorresponding to the normally functioning pre-semiconductor-chipportion, whereas any latent image corresponding to an electrodeconnected to the malfunctioning pre-semiconductor-chip portion andhaving an end face located at the at least one of the side surfaces ofthe main body on which the wiring is disposed is not formed on a portionof the photoresist layer corresponding to the malfunctioningpre-semiconductor-chip portion; and a step of developing the photoresistlayer performed after the exposure step.

The photoresist layer may be negative-working. In this case, the step offorming the frame may include: an exposure step in which a portion ofthe photoresist layer corresponding to the normally functioningpre-semiconductor-chip portion is exposed in a pattern corresponding tothe plurality of electrodes whereas a portion of the photoresist layercorresponding to the malfunctioning pre-semiconductor-chip portion issubjected to an overall exposure; and a step of developing thephotoresist layer performed after the exposure step.

The photoresist layer may be positive-working. In this case, the step offorming the frame may include: an exposure step in which a portion ofthe photoresist layer corresponding to the normally functioningpre-semiconductor-chip portion is exposed in a pattern corresponding tothe plurality of electrodes whereas a portion of the photoresist layercorresponding to the malfunctioning pre-semiconductor-chip portion isnot subjected to any exposure; and a step of developing the photoresistlayer performed after the exposure step.

In the case where the photoresist layer is negative-working, the step offorming the frame may include: a first exposure step of exposing all ofthe plurality of portions of the photoresist layer in a patterncorresponding to the plurality of electrodes; a second exposure step ofsubjecting only a portion of the photoresist layer corresponding to themalfunctioning pre-semiconductor-chip portion to an overall exposure,the second exposure step being performed before or after the firstexposure step; and a step of developing the photoresist layer performedafter the first and second exposure steps.

A first layered chip package according to the present inventionincludes: a main body having a top surface, a bottom surface and fourside surfaces; and wiring disposed on at least one of the side surfacesof the main body. The main body includes a plurality of pairs of layerportions stacked, each of the plurality of pairs consisting of two layerportions stacked. The plurality of pairs of layer portions include aplurality of specific pairs of layer portions, each of the plurality ofspecific pairs consisting of a first-type layer portion and asecond-type layer portion. The number of the plurality of specific pairsis an even number. Each of the first-type layer portion and thesecond-type layer portion includes a semiconductor chip. The first-typelayer portion further includes a plurality of electrodes, each of theplurality of electrodes being connected to the semiconductor chip andhaving an end face located at the at least one of the side surfaces ofthe main body on which the wiring is disposed, whereas the second-typelayer portion does not include any electrode connected to thesemiconductor chip and having an end face located at the at least one ofthe side surfaces of the main body on which the wiring is disposed. Thewiring is connected to the end face of each of the plurality ofelectrodes.

In the first layered chip package according to the present invention,the plurality of pairs of layer portions may further include at leastone pair of two first-type layer portions.

In the first layered chip package according to the present invention,the number of the first-type layer portions included in the main bodymay be eight.

In the first layered chip package according to the present invention,the semiconductor chip included in the first-type layer portion may be anormally functioning one whereas the semiconductor chip included in thesecond-type layer portion may be a malfunctioning one.

In the first layered chip package according to the present invention,the semiconductor chip may have four side surfaces, and each of thefirst-type layer portion and the second-type layer portion may furtherinclude an insulating portion covering at least one of the four sidesurfaces of the semiconductor chip. In this case, the insulating portionmay have at least one end face located at the at least one of the sidesurfaces of the main body on which the wiring is disposed, and the endface of each of the plurality of electrodes may be surrounded by theinsulating portion.

In the first layered chip package according to the present invention,one of the plurality of specific pairs of layer portions may be disposedclosest to the top surface or the bottom surface of the main body amongthe plurality of pairs of layer portions included in the main body.

The first layered chip package according to the present invention mayfurther include a plurality of terminals disposed on one of the topsurface and the bottom surface of the main body, and the wiring may beconnected to the plurality of terminals. In this case, one of theplurality of specific pairs of layer portions may be disposed farthestfrom the surface of the main body on which the plurality of terminalsare disposed, among the plurality of pairs of layer portions included inthe main body.

A second layered chip package according to the present inventionincludes: a main body having a top surface, a bottom surface and fourside surfaces; and wiring disposed on at least one of the side surfacesof the main body. The main body includes at least nine layer portionsstacked, the at least nine layer portions consisting of eight first-typelayer portions and at least one second-type layer portion. The at leastnine layer portions include at least four pairs of layer portions, eachof the at least four pairs consisting of two layer portions stacked. Theat least four pairs of layer portions include at least one specific pairof layer portions, the specific pair of layer portions consisting of oneeach of the first-type and second-type layer portions. Each of thefirst-type and second-type layer portions includes a semiconductor chip.Each of the first-type layer portions further includes a plurality ofelectrodes, each of the plurality of electrodes being connected to thesemiconductor chip and having an end face located at the at least one ofthe side surfaces of the main body on which the wiring is disposed,whereas the at least one second-type layer portion does not include anyelectrode connected to the semiconductor chip and having an end facelocated at the at least one of the side surfaces of the main body onwhich the wiring is disposed. The wiring is connected to the end face ofeach of the plurality of electrodes.

In the second layered chip package according to the present invention,the semiconductor chip included in each of the first-type layer portionsmay be a normally functioning one whereas the semiconductor chipincluded in each of the at least one second-type layer portion may be amalfunctioning one.

In the second layered chip package according to the present invention,the semiconductor chip may have four side surfaces, and each of thefirst-type and second-type layer portions may further include aninsulating portion covering at least one of the four side surfaces ofthe semiconductor chip. In this case, the insulating portion may have atleast one end face located at the at least one of the side surfaces ofthe main body on which the wiring is disposed, and the end face of eachof the plurality of electrodes may be surrounded by the insulatingportion.

In the second layered chip package according to the present invention,the at least nine layer portions may further include an additionalfirst-type layer portion disposed closest to the top surface or thebottom surface of the main body among the at least nine layer portions.

The second layered chip package according to the present invention mayfurther include a plurality of terminals disposed on one of the topsurface and the bottom surface of the main body, and the wiring may beconnected to the plurality of terminals. In this case, the at least ninelayer portions may further include an additional first-type layerportion disposed farthest from or closest to the surface of the mainbody on which the plurality of terminals are disposed, among the atleast nine layer portions.

According to the method of manufacturing a layered chip package of thepresent invention, or the first or second layered chip package of thepresent invention, it is possible to disable the use of a malfunctioningchip while reducing problems attributable to wiring connected to themalfunctioning chip.

According to the method of manufacturing a layered chip package of thepresent invention, the layered substructure is used to fabricate thepre-main-body stack which is a stack of a predetermined two or greaternumber of pairs of layer portions including at least one specific pairof layer portions, and the main body is fabricated by stacking at leastone additional first-type layer portion together with the pre-main-bodystack, the number of the at least one additional first-type layerportion being equal to the number of the at least one specific pair oflayer portions included in the pre-main-body stack. The presentinvention thus makes it possible to implement, at low cost, a layeredchip package that performs equally well irrespective of whether amalfunctioning chip is included or not.

In the first layered chip package according to the present invention,the number of the specific pairs of layer portions is an even number.When a stack of a predetermined number of pairs of layer portionsincludes at least one specific pair of layer portions, the main body ofthis layered chip package is formed by stacking at least one additionalspecific pair of layer portions together with the foregoing stack, thenumber of the at least one additional specific pair of layer portionsbeing equal to the number of the at least one specific pair of layerportions included in the stack. The present invention thus makes itpossible to implement, at low cost, a layered chip package that performsequally well irrespective of whether a malfunctioning chip (the chip inthe second-type layer portion) is included or not.

In the second layered chip package according to the present invention,the main body includes at least nine layer portions stacked, the atleast nine layer portions consisting of eight first-type layer portionsand at least one second-type layer portion. The at least nine layerportions include at least four pairs of layer portions, and the at leastfour pairs of layer portions include at least one specific pair of layerportions. When a stack of four pairs of layer portions includes at leastone specific pair of layer portions, the main body is formed by stackingat least one additional first-type layer portion together with theforegoing stack, the number of the at least one additional first-typelayer portion being equal to the number of the at least one specificpair of layer portions included in the stack. The present invention thusmakes it possible to implement, at low cost, a layered chip package thatperforms equally well irrespective of whether a malfunctioning chip (thechip in the second-type layer portion) is included or not.

Other and further objects, features and advantages of the presentinvention will appear more fully from the following description.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a perspective view of a layered chip package according to afirst embodiment of the invention drawn such that respective end facesof a plurality of first electrodes are visible.

FIG. 2 is a perspective view of the layered chip package according tothe first embodiment of the invention.

FIG. 3 is an exploded perspective view of a pair of layer portionsincluded in the layered chip package of FIG. 1.

FIG. 4 is a cross-sectional view of a portion of a pre-substructurewafer fabricated in a step of a method of manufacturing the layered chippackage according to the first embodiment of the invention.

FIG. 5 is a cross-sectional view of a portion of a pre-polishingsubstructure main body fabricated in a step that follows a distinctionstep performed on the pre-substructure wafer of FIG. 4.

FIG. 6 is a cross-sectional view of a portion of a structure fabricatedin a step that follows the step of FIG. 5.

FIG. 7 is a cross-sectional view of a portion of a structure fabricatedin a step that follows the step of FIG. 6.

FIG. 8 is a cross-sectional view of a portion of a pre-polishingsubstructure fabricated in a step that follows the step of FIG. 7.

FIG. 9 is a perspective view of the pre-substructure wafer fabricated inthe step of FIG. 4.

FIG. 10 is a cross-sectional view illustrating an example of theinternal structure of a pre-semiconductor-chip portion of thepre-substructure wafer of FIG. 9.

FIG. 11 is a perspective view of a portion of the pre-polishingsubstructure main body fabricated in the step of FIG. 5.

FIG. 12 is a perspective view of a portion of the pre-polishingsubstructure fabricated in the step of FIG. 8.

FIG. 13 is an illustrative view showing the step of distinguishingbetween a normally functioning pre-semiconductor-chip portion and amalfunctioning pre-semiconductor-chip portion in the method ofmanufacturing the layered chip package according to the first embodimentof the invention.

FIG. 14 is an illustrative view showing an example of the configurationof an exposure apparatus for use in the method of manufacturing thelayered chip package according to the first embodiment of the invention.

FIG. 15 is a flow chart showing an exposure step for forming a pluralityof electrodes in the method of manufacturing the layered chip packageaccording to the first embodiment of the invention.

FIG. 16 is an illustrative view showing the exposure step for formingthe plurality of electrodes in the method of manufacturing the layeredchip package according to the first embodiment of the invention.

FIG. 17 is an illustrative view showing a development step that followsthe exposure step of FIG. 16.

FIG. 18 is an illustrative view showing a plating step that follows thedevelopment step of FIG. 17.

FIG. 19 is a cross-sectional view of a portion of a stack fabricated ina step that follows the step of FIG. 8.

FIG. 20 is a cross-sectional view of a portion of a stack fabricated ina step that follows the step of FIG. 19.

FIG. 21 is a: perspective view of a portion of a substructure fabricatedin the step of FIG. 20.

FIG. 22 is a plan view showing an example of layouts of a plurality ofterminals and a plurality of electrodes of a first substructure shown inFIG. 20.

FIG. 23 is a plan view showing an example of layouts of a plurality ofterminals and a plurality of electrodes of a second substructure shownin FIG. 20.

FIG. 24 is a perspective view of a terminal wafer for use in the methodof manufacturing the layered chip package according to the firstembodiment of the invention.

FIG. 25 is an illustrative view showing a first example of the step offabricating a pre-main-body stack in the method of manufacturing thelayered chip package according to the first embodiment of the invention.

FIG. 26 is an illustrative view showing a second example of the step offabricating the pre-main-body stack in the method of manufacturing thelayered chip package according to the first embodiment of the invention.

FIG. 27 is an illustrative view showing a third example of the step offabricating the pre-main-body stack in the method of manufacturing thelayered chip package according to the first embodiment of the invention.

FIG. 28 is a perspective view showing a pre-main-body stack that doesnot include a specific pair of layer portions.

FIG. 29 is an illustrative view showing the step of fabricating a mainbody in the method of manufacturing the layered chip package accordingto the first embodiment of the invention.

FIG. 30 is a perspective view showing a side surface of a layer portionincluded in the main body.

FIG. 31 is a perspective view showing a state in which a plurality ofmain bodies are aligned.

FIG. 32 is a perspective view showing a layered chip package that doesnot include a specific pair of layer portions.

FIG. 33 is a perspective view showing an example of use of the layeredchip package according to the first embodiment of the invention.

FIG. 34 is a perspective view showing another example of use of thelayered chip package according to the first embodiment of the invention.

FIG. 35 is a perspective view showing still another example of use ofthe layered chip package according to the first embodiment of theinvention.

FIG. 36 is a perspective view showing a modification example of thelayered chip package according to the first embodiment of the invention.

FIG. 37 is a perspective view of a layered chip package according to asecond embodiment of the invention drawn such that respective end facesof a plurality of first electrodes are visible.

FIG. 38 is an illustrative view showing the step of fabricating a mainbody in a method of manufacturing the layered chip package according tothe second embodiment of the invention.

FIG. 39 is a cross-sectional view showing a portion of a pre-polishingsubstructure for an additional layer portion for use in the method ofmanufacturing the layered chip package according to the secondembodiment of the invention.

FIG. 40 is a cross-sectional view showing a portion of a substructurefor the additional layer portion for use in the method of manufacturingthe layered chip package according to the second embodiment of theinvention.

FIG. 41 is a perspective view of a layered chip package according to athird embodiment of the invention drawn such that respective end facesof a plurality of first electrodes are visible.

FIG. 42 is an illustrative view showing the step of fabricating a mainbody in a method of manufacturing the layered chip package according tothe third embodiment of the invention.

FIG. 43 is a perspective view showing a stack of a substructure and aterminal wafer for use in the method of manufacturing the layered chippackage according to the third embodiment of the invention.

FIG. 44 is a flow chart showing an exposure step for forming a pluralityof electrodes in a method of manufacturing a layered chip packageaccording to a fourth embodiment of the invention.

FIG. 45 is an illustrative view showing the exposure step for formingthe plurality of electrodes in the method of manufacturing the layeredchip package according to the fourth embodiment of the invention.

FIG. 46 is an illustrative view showing a first exposure step forforming a plurality of electrodes in a method of manufacturing a layeredchip package according to a fifth embodiment of the invention.

FIG. 47 is an illustrative view showing a second exposure step forforming the plurality of electrodes in the method of manufacturing thelayered chip package according to the fifth embodiment of the invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First Embodiment

Embodiments of the present invention will now be described in detailwith reference to the drawings. Reference is first made to FIG. 1 andFIG. 2 to describe the configuration of a layered chip package accordingto a first embodiment of the invention. Each of FIG. 1 and FIG. 2 is aperspective view of the layered chip package according to the presentembodiment. FIG. 1 is drawn such that respective end faces of aplurality of first electrodes described later are visible. As shown inFIG. 1 and FIG. 2, the layered chip package 1 according to the presentembodiment includes a main body 2 in the shape of a rectangular solid.The main body 2 has a top surface 2 a, a bottom surface 2 b, a firstside surface 2 c and a second side surface 2 d facing toward oppositedirections, and a third side surface 2 e and a fourth side surface 2 ffacing toward opposite directions.

The layered chip package 1 further includes wiring disposed on at leastone of the side surfaces of the main body 2. In the example shown inFIG. 1 and FIG. 2, the layered chip package 1 includes first wiring 3Adisposed on the first side surface 2 c of the main body 2, and secondwiring 3B disposed on the second side surface 2 d of the main body 2. Inthe following description, any wiring is represented by referencenumeral 3. FIG. 1 shows the first side surface 2 c of the main body 2with the first wiring 3A shown with broken lines.

The main body 2 includes a plurality of layer portions stacked. In thepresent embodiment, in particular, the main body 2 includes at leastnine layer portions. The plurality of layer portions included in themain body 2 include a plurality of pairs of layer portions stacked. Eachof the plurality of pairs consists of two layer portions stacked. In thepresent embodiment, in particular, the plurality of layer portionsincluded in the main body 2 are all in pairs. Therefore, in the presentembodiment, the main body 2 includes at least five pairs of layerportions (at least ten layer portions).

By way of example, FIG. 1 and FIG. 2 show that the main body 2 includesfive pairs of layer portions 11P, 12P, 13P, 14P and 15P arranged in thisorder from the top. A pair of layer portions 11P consists of an upperlayer portion 11A and a lower layer portion 11B. A pair of layerportions 12P consists of an upper layer portion 12A and a lower layerportion 12B. A pair of layer portions 13P consists of an upper layerportion 13A and a lower layer portion 13B. A pair of layer portions 14Pconsists of an upper layer portion 14A and a lower layer portion 14B. Apair of layer portions 15P consists of an upper layer portion 15A and alower layer portion 15B. In the following description, any pair of layerportions is represented by reference numeral 10P. The upper layerportion of any pair of layer portions 10P is represented by referencenumeral 10A, and the lower layer portion of any pair of layer portions10P is represented by reference numeral 10B. Any layer portion isrepresented by reference numeral 10. Two layer portions 10A and 10Bconstituting a pair of layer portions 10P are bonded to each other withan adhesive.

The main body 2 further includes a terminal layer 20 laid on theuppermost layer portion 11A. Every vertically adjacent two pairs oflayer portions 10P are bonded to each other with an adhesive, and so arethe layer portion 11A and the terminal layer 20 to each other. The layerportions 11A to 15B and the terminal layer 20 each have a top surface, abottom surface, and four side surfaces. The terminal layer 20 includes aterminal layer main body 21 having a top surface and a bottom surface,and a plurality of pad-shaped terminals 22 disposed on the top surfaceof the terminal layer main body 21. The top surface of the terminallayer main body 21 constitutes the top surface 2 a of the main body 2.The plurality of pad-shaped terminals 22 function as external connectingterminals of the layered chip package 1. Some of the pad-shapedterminals 22 each have an end face located at the side surface 2 c ofthe main body 2, and the first wiring 3A is connected to these endfaces. Some others of the pad-shaped terminals 22 each have an end facelocated at the side surface 2 d of the main body 2, and the secondwiring 3B is connected to these end faces.

The plurality of layer portions 10 included in the main body 2 include aplurality of first-type layer portions and at least one second-typelayer portion. In the present embodiment, in particular, the number ofthe first-type layer portions included in the main body 2 is eight. Theplurality of pairs of layer portions 10P included in the main body 2include at least one specific pair of layer portions, the specific pairof layer portions consisting of one first-type layer portion and onesecond-type layer portion. In the following description, a specific pairof layer portions is represented by reference numeral 10PS. In thepresent embodiment, in particular, the plurality of pairs of layerportions 10P included in the main body 2 include a plurality of specificpairs of layer portions 10PS. In the present embodiment, in particular,the number of the specific pairs of layer portions 10PS included in themain body 2 is an even number.

FIG. 1 shows an example in which two pairs of layer portions 14P and 15Pare the specific pairs of layer portions 10PS. In the pair of layerportions 14P, the layer portion 14A is the first-type layer portion andthe layer portion 14B is the second-type layer portion. In the pair oflayer portions 15P, the layer portion 15A is the first-type layerportion and the layer portion 15B is the second-type layer portion. Inthe example shown in FIG. 1, among the plurality of layer portions 10included in the main body 2, eight layer portions 10 other than thelayer portions 14B and 15B are the first-type layer portions. Thedifference between the first-type layer portion and the second-typelayer portion will be described in detail later. FIG. 1 shows an examplein which, in the specific pairs of layer portions 14P and 15P, the upperlayer portions 14A and 15A are the first-type layer portions and thelower layer portions 14B and 15B are the second-type layer portions.However, in a specific pair of layer portion 10PS, the lower layerportion may be the first-type layer portion and the upper layer portionmay be the second-type layer portion.

In the present embodiment, one of the plurality of specific pairs oflayer portions 10PS included in the main body 2 is disposed closest tothe top surface 2 a or the bottom surface 2 b of the main body 2 amongthe plurality of pairs of layer portions 10P included in the main body2. In the example shown in FIG. 1, the specific pair of layer portions15P is disposed closest to the bottom surface 2 b of the main body 2among the plurality of pairs of layer portions 10P included in the mainbody 2.

In the present embodiment, one of the plurality of specific pairs oflayer portions 10PS included in the main body 2 is disposed farthestfrom the surface of the main body 2 on which the plurality of terminals22 are disposed, among the plurality of pairs of layer portions 10Pincluded in the main body 2. In the example shown in FIG. 1, thespecific pair of layer portions 15P is disposed farthest from the topsurface 2 a of the main body 2 on which the plurality of terminals 22are disposed, among the plurality of pairs of layer portions 10Pincluded in the main body 2.

FIG. 3 is an exploded perspective view of the pair of layer portions 11Pincluded in the layered chip package 1 shown in FIG. 1 and FIG. 2. Asshown in FIG. 3, the layer portions 11A and 11B constituting the pair oflayer portions 11P each include a semiconductor chip 30. Thesemiconductor chip 30 has: a first surface 30 a having a device formedthereon; a second surface 30 b opposite to the first surface 30 a; afirst side surface 30 c and a second side surface 30 d facing towardopposite directions; and a third side surface 30 e and a fourth sidesurface 30 f facing toward opposite directions. The side surfaces 30 c,30 d, 30 e and 30 f respectively face toward the side surfaces 2 c, 2 d,2 e and 2 f of the main body 2. The layer portions 11A and 11B arepositioned such that the first surfaces 30 a of their respectivesemiconductor chips 30 face toward each other.

Each of the layer portions 11A and 11B further includes: an insulatingportion 31 covering at least one of the four side surfaces of thesemiconductor chip 30; and a plurality of electrodes 32 connected to thesemiconductor chip 30. The insulating portion 31 has at least one endface 31 a located at the at least one of the side surfaces of the mainbody 2 on which the wiring is disposed. In the example shown in FIG. 3,the insulating portion 31 covers all of the four side surfaces of thesemiconductor chip 30, and has four end faces 31 a that are respectivelylocated at the four side surfaces of the main body 2. In this example,the insulating portion 31 further covers the first surface 30 a of thesemiconductor chip 30.

In the example shown in FIG. 3, the plurality of electrodes 32 include aplurality of first electrodes 32A and a plurality of second electrodes32B. Each of the plurality of first electrodes 32A has an end face 32Aathat is located at the first side surface 2 c of the main body 2 andsurrounded by the insulating portion 31. Each of the plurality of secondelectrodes 32B has an end face 32Ba that is located at the second sidesurface 2 d of the main body 2 and surrounded by the insulating portion31. In the following description, any electrode is represented byreference numeral 32, and the end face of any electrode 32 isrepresented by reference numeral 32 a.

Each of the pairs of layer portions 12P and 13P has the sameconfiguration as the pair of layer portions 11P shown in FIG. 3. Each ofthe layer portions 14A and 15A, which are the first-type layer portions,has the same configuration as the layer portion 11A shown in FIG. 3.Each of the layer portions 14B and 15B, which are the second-type layerportions, does not include any electrode connected to the semiconductorchip 30 and having an end face located at the at least one of the sidesurfaces of the main body 2 on which the wiring 3 is disposed.Consequently, as shown in FIG. 1, no end faces of electrodes are presentat the side surfaces of the layer portions 14B and 15B. The remainder ofthe configuration of each of the layer portions 14B and 15B is the sameas that of the layer portion 11B shown in FIG. 3.

The semiconductor chip 30 of the first-type layer portion 10 is anormally functioning one, whereas the semiconductor chip 30 of thesecond-type layer portion 10 is a malfunctioning one. Hereinafter, anormally functioning semiconductor chip 30 will be called anon-defective semiconductor chip 30, and a malfunctioning semiconductorchip 30 will be called a defective semiconductor chip 30. It should benoted that the second-type layer portion 10 may include any electrode orwiring other than one that is connected to the semiconductor chip 30 andhas an end face located at the at least one of the side surfaces of themain body 2 on which the wiring 3 is disposed. For example, thesecond-type layer portion 10 may include an electrode that is connectedto the semiconductor chip 30 but does not have an end face located atthe at least one of the side surfaces of the main body 2 on which thewiring 3 is disposed, and/or wiring for connecting terminals of thesemiconductor chip 30 to each other.

The first wiring 3A disposed on the first side surface 2 c of the mainbody 2 is connected to the end faces 32Aa of the plurality of firstelectrodes 32A of the plurality of layer portions 10. The second wiring3B disposed on the second side surface 2 d of the main body 2 isconnected to the end faces 32Ba of the plurality of second electrodes32B of the plurality of layer portions 10.

The semiconductor chip 30 may be a memory chip constituting a memorysuch as a flash memory, DRAM, SRAM, MRAM, PROM or FeRAM. In this case,it is possible to implement a large-capacity memory through the use ofthe layered chip package 1 including a plurality of semiconductor chips30. Furthermore, according to the layered chip package 1 of the presentembodiment, it is possible to easily implement a memory of variouscapacities such as 64 GB (gigabytes), 128 GB and 256 GB by changing thenumber of the semiconductor chips 30 included in the layered chippackage 1.

In the case where a semiconductor chip 30 includes a plurality of memorycells and where one or more of the memory cells are defective, thesemiconductor chip 30 is non-defective if it can function normally byemploying the redundancy technique.

The semiconductor chips 30 are not limited to memory chips, and may befor use for implementing other devices such as CPUs, sensors, anddriving circuits for sensors. The layered chip package 1 according tothe present embodiment is particularly suitable for implementing an SiP.

A method of manufacturing the layered chip package 1 according to thepresent embodiment will now be described. The method of manufacturingthe layered chip package 1 according to the present embodiment includesthe steps of: fabricating a layered substructure by stacking twosubstructures each of which includes a plurality of preliminary layerportions aligned, each of the preliminary layer portions being intendedto become any one of the layer portions 10 included in the main body 2,the substructures being intended to be cut later at a boundary betweenevery adjacent two of the preliminary layer portions; fabricating apre-main-body stack by using the layered substructure, the pre-main-bodystack being a stack of a predetermined two or greater number of pairs oflayer portions 10P including at least one specific pair of layerportions; fabricating the main body 2 by stacking at least oneadditional first-type layer portion together with the pre-main-bodystack, the number of the at least one additional first-type layerportion being equal to the number of the at least one specific pair oflayer portions 10PS included in the pre-main-body stack; and completingthe layered chip package 1 by forming the wiring 3 on the main body 2.In the present embodiment, in particular, the predetermined two orgreater number mentioned above is four.

Reference is now made to FIG. 4 to FIG. 23 to describe in detail thestep of fabricating the layered substructure in the method ofmanufacturing the layered chip package 1 according to the presentembodiment. In the step of fabricating the layered substructure, first,a plurality of pre-substructure wafers are fabricated.

FIG. 4 shows the step of fabricating a single pre-substructure wafer. Inthis step, a semiconductor wafer 100 having a first surface 100 a and asecond surface 100 b that face toward opposite directions is subjectedto processing, such as a wafer process, at the first surface 100 a, tothereby fabricate a pre-substructure wafer 101 which includes aplurality of pre-semiconductor-chip portions 30P aligned. The pluralityof pre-semiconductor-chip portions 30P each include a device, and are tobecome the plurality of semiconductor chips 30 later. The plurality ofpre-semiconductor-chip portions 30P of the pre-substructure wafer 101may later become a plurality of semiconductor chips 30 of the same type.The pre-substructure wafer 101 has a first surface 101 a correspondingto the first surface 100 a of the semiconductor wafer 100, and a secondsurface 101 b corresponding to the second surface 100 b of thesemiconductor wafer 100. In the pre-substructure wafer 101, theplurality of pre-semiconductor-chip portions 30P may be aligned in arow, or may be aligned in a plurality of rows such that a plurality ofones of the pre-semiconductor-chip portions 30P are aligned in each ofvertical and horizontal directions. In the following description, it isassumed that the plurality of pre-semiconductor-chip portions 30P arealigned in a plurality of rows such that a plurality of ones of thepre-semiconductor-chip portions 30P are aligned in each of vertical andhorizontal directions in the pre-substructure wafer 101.

The semiconductor wafer 100 may be a silicon wafer, for example. Thewafer process is a process in which a wafer is processed into aplurality of devices that are not yet separated into a plurality ofchips. In the pre-substructure wafer 101, the first surface 101 a is adevice formation surface on which devices are formed. Each of theplurality of pre-semiconductor-chip portions 30P has a plurality ofpad-shaped terminals 34 disposed on the first surface 101 a of thepre-substructure wafer 101.

FIG. 9 is a perspective view of the pre-substructure wafer 101. As shownin FIG. 9, the pre-substructure wafer 101 is provided with a pluralityof scribe lines 102A and a plurality of scribe lines 102B. The scribelines 102A extend horizontally to pass through boundaries between everytwo pre-semiconductor-chip portions 30P that are vertically adjacent toeach other. The scribe lines 102B extend vertically to pass throughboundaries between every two pre-semiconductor-chip portions 30P thatare horizontally adjacent to each other. To facilitate understanding,FIG. 9 depicts the pre-semiconductor-chip portions 30P larger relativeto the semiconductor wafer 100. For example, assuming that thesemiconductor wafer 100 is a 12-inch wafer and a side of the top surfaceof each pre-semiconductor-chip portion 30 is 8 to 10 mm long, 700 to 900pre-semiconductor-chip portions 30P are obtainable from a singlesemiconductor wafer 100.

FIG. 10 is a cross-sectional view illustrating an example of theinternal structure of each pre-semiconductor-chip portion 30P of thepre-substructure wafer 101 of FIG. 9. Here is given an example in whicha plurality of memory cells of a flash memory are formed as a device inthe pre-semiconductor-chip portion 30P. FIG. 10 shows one of theplurality of memory cells as a device formed in thepre-semiconductor-chip portion 30P. The memory cell 40 includes a source42 and a drain 43 formed near a surface of a P-type silicon substrate 41composed of the semiconductor wafer 100, i.e., near the first surface100 a of the semiconductor wafer 100. The source 42 and the drain 43 areboth N-type regions. The source 42 and the drain 43 are disposed at apredetermined distance from each other so that a channel composed of aportion of the P-type silicon substrate 41 is provided between thesource 42 and the drain 43. The memory cell 40 further includes aninsulating film 44, a floating gate 45, an insulating film 46 and acontrol gate 47 that are stacked in this order on the surface of thesubstrate 41 at the location between the source 42 and the drain 43. Thememory cell 40 further includes an insulating layer 48 covering thesource 42, the drain 43, the insulating film 44, the floating gate 45,the insulating film 46 and the control gate 47. The insulating layer 48has contact holes that open at the tops of the source 42, the drain 43and the control gate 47, respectively. The memory cell 40 includes asource electrode 52, a drain electrode 53, and a control gate electrode57 that are formed on the insulating layer 48 at locations above thesource 42, the drain 43 and the control gate 47, respectively. Thesource electrode 52, the drain electrode 53 and the control gateelectrode 57 are connected to the source 42, the drain 43 and thecontrol gate 47, respectively, through the respective contact holes.

A plurality of pre-substructure wafers 101 are each fabricated throughthe step described with reference to FIG. 4.

Next, a wafer sort test is performed on each of the plurality ofpre-substructure wafers 101 to distinguish between a normallyfunctioning pre-semiconductor-chip portion 30P and a malfunctioningpre-semiconductor-chip portion 30P among the plurality ofpre-semiconductor-chip portions 30P included in each pre-substructurewafer 101. In the wafer sort test, a probe of a testing device isbrought into contact with the terminals 34 of eachpre-semiconductor-chip portion 30P and whether thepre-semiconductor-chip portion 30P functions normally or not is therebytested with the testing device.

FIG. 5 shows the next step. In this step, first, a protection film 103made of, for example, photoresist, is formed to cover the entire firstsurface 101 a of the pre-substructure wafer 101. Next, at least onegroove 104 is formed in the pre-substructure wafer 101. The at least onegroove 104 opens at the first surface 101 a of the pre-substructurewafer 101 and extends to be adjacent to at least one of thepre-semiconductor-chip portions 30P. Here, a plurality of grooves 104are formed as shown in FIG. 5. At the positions of the boundariesbetween every two adjacent pre-semiconductor-chip portions 30P, thegrooves 104 are formed to pass through the boundaries between every twoadjacent pre-semiconductor-chip portions 30P. In this way, apre-polishing substructure main body 105 is formed by thepre-substructure wafer 101 having undergone the formation of theplurality of grooves 104 therein. The pre-polishing substructure mainbody 105 includes the plurality of pre-semiconductor-chip portions 30P.The pre-polishing substructure main body 105 has a first surface 105 aand a second surface 105 b. The first surface 105 a corresponds to thefirst surface 100 a of the semiconductor wafer 100 and the first surface101 a of the pre-substructure wafer 101. The second surface 105 bcorresponds to the second surface 100 b of the semiconductor wafer 100and the second surface 101 b of the pre-substructure wafer 101. Thepre-polishing substructure main body 105 further has the plurality ofgrooves 104 that open at the first surface 105 a. In the pre-polishingsubstructure main body 105, the first surface 105 a is a deviceformation surface on which devices are formed.

The plurality of grooves 104 are formed along the scribe lines 102A and102B shown in FIG. 9. The grooves 104 are formed such that their bottomsdo not reach the second surface 101 b of the pre-substructure wafer 101.The grooves 104 are each 10 to 150 μm wide, for example. The grooves 104are each 30 to 150 μm deep, for example. The grooves 104 may be formedusing a dicing saw, or by etching such as reactive ion etching.

FIG. 11 shows a portion of the pre-polishing substructure main body 105fabricated in the step of FIG. 5. In the present embodiment, theplurality of grooves 104 include a plurality of first grooves 104A and aplurality of second grooves 104B. The first grooves 104A and the secondgrooves 104B extend in directions orthogonal to each other. FIG. 11shows only one each of the first and second grooves 104A and 104B. Thefirst grooves 104A are formed along the scribe lines 102A shown in FIG.9, and the second grooves 104B are formed along the scribe lines 102Bshown in FIG. 9.

FIG. 6 shows a step that follows the step of FIG. 5. In this step,first, an insulating layer 106 is formed to fill the plurality ofgrooves 104 of the pre-polishing substructure main body 105 and to coverthe plurality of terminals 34. The insulating layer 106 will laterbecome part of the insulating portion 31. Next, a plurality of openings106 a for exposing the terminals 34 are formed in the insulating layer106.

The insulating layer 106 may be formed of a resin such as an epoxy resinor a polyimide resin. The insulating layer 106 may also be formed of aphotosensitive material such as a polyimide resin containing asensitizer. If the insulating layer 106 is formed of a photosensitivematerial, the openings 106 a of the insulating layer 106 may be formedby photolithography. If the insulating layer 106 is formed of anon-photosensitive material, the openings 106 a of the insulating layer106 may be formed by selectively etching the insulating layer 106.

The insulating layer 106 may include a first layer that fills thegrooves 104, and a second layer that covers the first layer and theterminals 34. In this case, the openings 106 a are formed in the secondlayer. Both of the first layer and the second layer may be formed of aresin such as an epoxy resin or a polyimide resin. The second layer maybe formed of a photosensitive material such as a polyimide resincontaining a sensitizer. If the second layer is formed of aphotosensitive material, the openings 106 a may be formed in the secondlayer by photolithography. If the second layer is formed of anon-photosensitive material, the openings 106 a may be formed in thesecond layer by selectively etching the second layer.

It is preferable that the insulating layer 106 be formed of a resinhaving a low thermal expansion coefficient. Forming the insulating layer106 of a resin having a low thermal expansion coefficient serves tofacilitate cutting of the insulating layer 106 when the insulating layer106 is cut later with a dicing saw.

It is preferable that the insulating layer 106 be transparent. If theinsulating layer 106 is transparent, it is possible to easily recognizealignment marks that will be formed on the insulating layer 106 later,through the insulating layer 106.

FIG. 7 shows a step that follows the step of FIG. 6. In this step,first, a photoresist layer is formed on the insulating layer 106 tocover the plurality of pre-semiconductor-chip portions 30P. Thephotoresist layer is intended to be used for forming the plurality ofelectrodes 32. The photoresist layer includes a plurality of portionscorresponding to all the pre-semiconductor-chip portions 30Prespectively. Each portion of the photoresist layer corresponding to asingle pre-semiconductor-chip portion 30P covers not only thepre-semiconductor-chip portion 30P but also an area where electrodes 32to be connected to the pre-semiconductor-chip portion 30P are located.Next, the photoresist layer is patterned by photolithography to therebyform a frame 108 having a plurality of grooves 108 a to lateraccommodate the electrodes 32. The grooves 108 a are not formed in aportion of the frame 108 corresponding to a malfunctioningpre-semiconductor-chip portion 30P. The step of forming the frame 108will be described in detail later.

FIG. 8 shows a step that follows the step of FIG. 7. In this step, theelectrodes 32 are formed in the grooves 108 a of the frame 108 by, forexample, plating. The electrodes 32 are formed such that part of each ofthe electrodes 32 lies on the insulating layer 106. The electrodes 32are connected to the terminals 34 through the openings 106 a. FIG. 12shows a portion of the structure fabricated in the step of FIG. 8.

The electrodes 32 are formed of a conductive material such as Cu. In thecase of forming the electrodes 32 by plating, a seed layer for platingis formed on the insulating layer 106 before forming the photoresistlayer. Next, the photoresist layer is formed on the seed layer andpatterned by photolithography to thereby form the frame 108. Thephotoresist layer is formed to be 10 to 20 μm thick, for example. Next,plating layers to become part of the electrodes 32 are formed by platingon the seed layer in the grooves of the frame 108. The plating layersare formed to be 5 to 15 μm thick, for example. Next, the frame 108 isremoved and the seed layer except portions thereof located below theplating layers is also removed by etching. As a result, the electrodes32 are formed of the plating layers and the portions of the seed layerremaining therebelow.

As shown in FIG. 12, in the step of forming the plurality of electrodes32, a plurality of alignment marks 107 are formed on the insulatinglayer 106 simultaneously with the formation of the electrodes 32. Thealignment marks 107 are disposed above the grooves 104. The material andforming method of the alignment marks 107 are the same as those of theelectrodes 32.

A pre-polishing substructure 109 shown in FIG. 8 and FIG. 12 is thusfabricated. The pre-polishing substructure 109 includes: thepre-polishing substructure main body 105; the insulating layer 106 thatfills the grooves 104 of the pre-polishing substructure main body 105and that will later become part of the insulating portion 31; theplurality of electrodes 32 each having a portion lying on the insulatinglayer 106; and the plurality of alignment marks 107 disposed on theinsulating layer 106. The pre-polishing substructure 109 has a firstsurface 109 a and a second surface 109 b. The first surface 109 acorresponds to the first surface 100 a of the semiconductor wafer 100and the first surface 101 a of the pre-substructure wafer 101. Thesecond surface 109 b corresponds to the second surface 100 b of thesemiconductor wafer 100 and the second surface 101 b of thepre-substructure wafer 101.

A plurality of pre-polishing substructures 109 are each fabricatedthrough the steps described with reference to FIG. 5 to FIG. 8.

The step of forming the frame 108 and the step of forming the pluralityof electrodes 32 will now be described in detail with reference to FIG.13 to FIG. 18. FIG. 13 shows a plurality of pre-substructure wafers 101.As previously described, the process of distinguishing between anormally functioning pre-semiconductor-chip portion 30P and amalfunctioning pre-semiconductor-chip portion 30P has been performed onthe plurality of pre-semiconductor-chip portions 30P included in eachpre-substructure wafer 101 by the wafer sort test. In FIG. 13, squaresmarked with “X” represent malfunctioning pre-semiconductor-chip portions30P, and the remaining squares represent normally functioningpre-semiconductor-chip portions 30P. The wafer sort test provideslocation information on the normally functioning pre-semiconductor-chipportions 30P and the malfunctioning pre-semiconductor-chip portions 30Pin each pre-substructure wafer 101. This location information will beused later in an exposure step for forming the frame 108.

FIG. 14 is an illustrative view showing an example of configuration ofan exposure apparatus used in the method of manufacturing the layeredchip package 1 according to the present embodiment. The exposureapparatus shown in FIG. 14 is a stepping projection exposure apparatus,or a so-called stepper. This exposure apparatus includes: a mask stage210 for retaining a mask 201; a driving device 211 for driving the maskstage 210 to move or replace the mask 201; a wafer stage 220 forretaining a wafer 202; a moving mechanism 221 for moving the wafer stage220; a driving device 222 for driving the moving mechanism 221; areduction projection optical system 203; an illumination device 204; adetection device 240 for detecting the location of the wafer 202; and acontrol device 250 for controlling the illumination device 204, thedriving devices 211 and 222 and the detection device 240.

The mask stage 210 is disposed above the wafer stage 220. The reductionprojection optical system 203 is disposed between the mask stage 210 andthe wafer stage 220. The illumination device 204 is disposed above themask stage 210 and applies light for exposure to the mask 201.

The moving mechanism 221 is capable of moving the wafer stage 220 in X,Y and Z directions shown in FIG. 14 and capable of changing the angle ofinclination of the wafer stage 220 with respect to the X-Y plane. The Xdirection and the Y direction are orthogonal to each other and are bothorthogonal to the direction of the optical axis of the reductionprojection optical system 203. The Z direction is parallel to thedirection of the optical axis of the reduction projection optical system203. The detection device 240 detects the location of the surface of thewafer 202 and the angle of inclination of the surface of the wafer 202with respect to the X-Y plane.

The control device 250 has a microprocessor unit (MPU), read only memory(ROM) and random access memory (RAM).

When exposing the wafer 202 using this exposure apparatus, a pluralityof pattern projection regions are defined on the surface of the wafer202. A ray bundle emitted from the illumination device 204 passesthrough the mask 201 and is applied to one of the pattern projectionregions by the reduction projection optical system 203. The mask patternof the mask 201 is thereby projected onto the one of the patternprojection regions through the reduction projection optical system 203,so that the process of exposing the one of the pattern projectionregions is performed. After performing the process of exposing the oneof the pattern projection regions based on the mask pattern, theexposure apparatus moves the wafer 202 in the X or Y direction, andperforms the same exposure process for a next one of the patternprojection regions.

In the step of forming the frame 108 of the present embodiment, first, aphotoresist layer is formed on the insulating layer 106 to cover theplurality of pre-semiconductor-chip portions 30P of the structure shownin FIG. 6. In the present embodiment, the photoresist layer isnegative-working. In the negative-working photoresist layer, the areasirradiated with light become insoluble in a developing solution whilethe unirradiated areas are soluble in the developing solution. Next, thephotoresist layer is patterned by photolithography to thereby form theframe 108. When forming the frame 108, the exposure apparatus shown inFIG. 14 is used for exposing the photoresist layer. In this case, thestructure of FIG. 6 with the photoresist layer formed thereon is thewafer 202 of FIG. 14. A plurality of pattern projection regions aredefined on portions of the surface of the photoresist layer thatcorrespond to the plurality of pre-semiconductor-chip portions 30P. Thesize of each pattern projection region is designed to be slightly largerthan the top surface of the pre-semiconductor-chip portion 30P so as tocover the area where the electrodes 32 are to be formed. The locationinformation on the normally functioning and malfunctioningpre-semiconductor-chip portions 30P in each pre-substructure wafer 101obtained by the wafer sort test is input to and held by the controldevice 250 when the photoresist layer of the wafer 202 corresponding tothe pre-substructure wafer 101 is exposed. The control device 250 canreplace the mask 201 based on the location information.

The exposure step of exposing the photoresist layer for forming theframe 108 of the present embodiment will now be described with referenceto the flow chart of FIG. 15. In this exposure step, the photoresistlayer is exposed such that a latent image corresponding to the pluralityof electrodes 32 is formed on a portion of the photoresist layercorresponding to a normally functioning pre-semiconductor-chip portion30P whereas any latent image corresponding to an electrode connected toa malfunctioning pre-semiconductor-chip portion 30P and having an endface located at the at least one of the side surfaces of the main body 2on which the wiring 3 is disposed is not formed on a portion of thephotoresist layer corresponding to the malfunctioningpre-semiconductor-chip portion 30P. In this exposure step, first, amongthe plurality of pattern projection regions corresponding to theplurality of pre-semiconductor-chip portions 30P, a pattern projectionregion corresponding to a first pre-semiconductor-chip portion 30P isselected to be exposed by the exposure apparatus of FIG. 14 (Step S101).Next, the control device 250 judges whether the pre-semiconductor-chipportion 30P corresponding to the selected pattern projection region is anormally functioning one or not (Step S102).

If the pre-semiconductor-chip portion 30P is judged as a normallyfunctioning one (Y) in Step S102, the portion of the photoresist layercorresponding to the normally functioning pre-semiconductor-chip portion30P is exposed in a pattern corresponding to the plurality of electrodes32 (hereinafter referred to as an electrode pattern) through a mask 201having the electrode pattern (Step S103). Specifically, the electrodepattern is configured to disallow light to be applied to an area of thepattern projection region where to form the grooves 108 a to lateraccommodate the electrodes 32 and to allow light to be applied to theremaining area of the pattern projection region. As a result of thisexposure, a latent image corresponding to the plurality of electrodes 32is formed on the portion of the photoresist layer corresponding to thenormally functioning pre-semiconductor-chip portion 30P. To be morespecific, in the portion of the photoresist layer corresponding to anormally functioning pre-semiconductor-chip portion 30P, the area whereto form the grooves 108 a to later accommodate the electrodes 32 issoluble in a developing solution while the remaining area becomesinsoluble in the developing solution upon this exposure.

If the pre-semiconductor-chip portion 30P is judged as a malfunctioningone (N) in Step S102, the portion of the photoresist layer correspondingto the malfunctioning pre-semiconductor-chip portion 30P is subjected toan overall exposure through a mask 201 that entirely passes light, orwithout using a mask 201 (Step S104). As a result, any latent imagecorresponding to an electrode connected to the malfunctioningpre-semiconductor-chip portion 30P and having an end face located at theat least one of the side surfaces of the main body 2 on which the wiring3 is disposed is not formed on the portion of the photoresist layercorresponding to the malfunctioning pre-semiconductor-chip portion 30P.Specifically, the entire portion of the photoresist layer correspondingto the malfunctioning pre-semiconductor-chip portion 30P becomesinsoluble in the developing solution. In the case where the second-typelayer portion 10 includes an electrode or wiring other than one that isconnected to the malfunctioning semiconductor chip 30 and that has anend face located at the at least one of the side surfaces of the mainbody 2 on which the wiring 3 is disposed, an exposure is performed inStep S104 such that a latent image corresponding to such an electrode orwiring is formed, instead of the overall exposure. In this case also,any latent image corresponding to an electrode connected to themalfunctioning pre-semiconductor-chip portion 30P and having an end facelocated at the at least one of the side surfaces of the main body 2 onwhich the wiring 3 is disposed is not formed on the portion of thephotoresist layer corresponding to the malfunctioningpre-semiconductor-chip portion 30P.

After the Step S103 or S104 is performed, the control device 250 judgeswhether the pattern projection region having undergone the exposure inStep S103 or S104 is the region corresponding to the lastpre-semiconductor-chip portion 30P (Step S105). If the patternprojection region is judged as corresponding to the lastpre-semiconductor-chip portion 30P (Y), the exposure step is finished.If the pattern projection region is judged as not corresponding to thelast pre-semiconductor-chip portion 30P (N), a pattern projection regioncorresponding to a next pre-semiconductor-chip portion 30P is selectedto be exposed (Step S106) and the process starting from Step S102 isrepeated.

FIG. 16 is an illustrative view showing the exposure step of FIG. 15.Reference numeral 108P in FIG. 16 indicates the photoresist layer to beused for forming the frame 108. Portions (a), (b), (c) and (d) of FIG.16 indicate regions for which Step S103 or S104 is to be performed. Inthe example of FIG. 16, Step S103 or S104 is performed in the order ofthe regions (a), (b), (c) and (d). For the regions (a), (c) and (d), thecorresponding pre-semiconductor-chip portions 30P have been judged asnormally functioning ones in Step S102 and consequently the portions ofthe photoresist layer 108P corresponding to those normally functioningpre-semiconductor-chip portions 30P are each exposed in the electrodepattern through a mask 201A having the electrode pattern. For the region(b), the corresponding pre-semiconductor-chip portion 30P has beenjudged as a malfunctioning one in Step S102 and consequently the portionof the photoresist layer 108P corresponding to the malfunctioningpre-semiconductor-chip portion 30P is subjected to an overall exposurethrough a mask 201B that entirely passes light (or without using anymask 201). Portion (e) of FIG. 16 shows the plane geometry of the latentimage formed on the photoresist layer 108P by exposure.

After the exposure step described above, the photoresist layer 108P isdeveloped with a developing solution and the frame 108 is therebyformed. FIG. 17 shows the frame 108 formed by development. Regions (a),(b), (c) and (d) of FIG. 17 correspond to the regions (a), (b), (c) and(d) of FIG. 16. In FIG. 17, in the regions (a), (c) and (d) the grooves108 a are formed in the frame 108, whereas in the region (b), grooves108 a are not formed in the frame 108. Portion (e) of FIG. 17 shows theplane geometries of the grooves 108 a.

Next, the electrodes 32 are formed in the grooves 108 a of the frame 108by, for example, plating, and then the frame 108 is removed. FIG. 18shows the electrodes 32 thus formed. Regions (a), (b), (c) and (d) ofFIG. 18 correspond to the regions (a), (b), (c) and (d) of FIG. 16. InFIG. 18 the electrodes 32 a are formed in the regions (a), (c) and (d),whereas in the region (b) there are not formed any electrode connectedto the pre-semiconductor-chip portion 30P. Portion (e) of FIG. 18 showsthe plane geometries of the electrodes 32 a.

Steps following the formation of the electrodes 32 will now bedescribed. FIG. 19 shows a step that follows the step of FIG. 8. In thisstep, two pre-polishing substructures 109 are bonded to each other withan insulating adhesive such that their respective first surfaces 109 aface toward each other. A stack including the two pre-polishingsubstructures 109 is thereby fabricated. An insulating layer 111 formedby the adhesive covers the electrodes 32 and will become part of theinsulating portion 31. It is preferred that the insulating layer 111 betransparent. Hereinafter, the lower one of the two pre-polishingsubstructures 109 shown in FIG. 19 will be called a first pre-polishingsubstructure 109. The pre-substructure wafer 101 serving as a base forfabricating the first pre-polishing substructure 109 will be hereinaftercalled a first pre-substructure wafer 101. The upper one of the twopre-polishing substructures 109 shown in FIG. 19 will be hereinaftercalled a second pre-polishing substructure 109. The pre-substructurewafer 101 serving as a base for fabricating the second pre-polishingsubstructure 109 will be hereinafter called a second pre-substructurewafer 101.

Next, both surfaces of the stack shown in FIG. 19, that is, the secondsurface 109 b of the first pre-polishing substructure 109 and the secondsurface 109 b of the second pre-polishing substructure 109, arepolished. This polishing is performed until the plurality of grooves 104become exposed. In FIG. 19 the broken lines indicate the positions ofthe second surfaces 109 b after the polishing.

FIG. 20 shows the stack having undergone the polishing of both surfacesas described above. As a result of polishing the second surface 109 b ofthe first pre-polishing substructure 109, the first pre-polishingsubstructure 109 is thinned by the polishing and thereby a substructure110 is formed. This substructure 110 will be hereinafter called a firstsubstructure 110. Similarly, as a result of polishing the second surface109 b of the second pre-polishing substructure 109, the secondpre-polishing substructure 109 is thinned by the polishing and thereby asubstructure 110 is formed. This substructure 110 will be hereinaftercalled a second substructure 110. Each of the first and secondsubstructures 110 has a thickness of, for example, 30 to 100 μm. Eachsubstructure 110 has a first surface 110 a corresponding to the firstsurface 109 a of the pre-polishing substructure 109; and a secondsurface 110 b opposite to the first surface 110 a. The second surface110 b is the polished surface.

In the step of polishing both surfaces of the stack including the twosubstructures 109 as above, after one of the two surfaces of the stackis polished, a plate-shaped jig 112 shown in FIG. 20 is bonded to thepolished surface and then the other surface is polished. Bonding the jig112 to the polished surface of the stack facilitates handling of thestack and prevents the stack from being damaged in a subsequent step. Ifthe insulating layers 106 and 111 are transparent, using a transparentjig such as an acrylic plate or a glass plate as the jig 112 allows thealignment marks 107 of the two substructures 110 included in the stackto be visible through the jig 112 and the insulating layers 106 and 111,all of which are transparent. This makes it easy to perform alignment oftwo or more of the stacks of FIG. 20 using the alignment marks 107 whenstacking the two or more of the stacks, as will be described later.

Polishing both surfaces of the stack including the two pre-polishingsubstructures 109 produces a layered substructure 114, which is a stackof two substructures 110, as shown in FIG. 20.

FIG. 21 shows a portion of the substructure 110 fabricated in the stepof FIG. 20. As previously described, by polishing the second surface 109b of the pre-polishing substructure 109 until the grooves 104 becomeexposed, the plurality of pre-semiconductor-chip portions 30P areseparated from each other and thereby become the semiconductor chips 30.The first surface 30 a of each semiconductor chip 30 corresponds to thefirst surface 100 a of the semiconductor wafer 100, and the secondsurface 30 b of each semiconductor chip 30 corresponds to the secondsurface 100 b of the semiconductor wafer 100. The plurality of terminals34 of each semiconductor chip 30 are disposed on the first surface 30 a.

The substructure 110 includes a plurality of preliminary layer portions110 c aligned, and is to be cut later at a boundary between everyadjacent two of the preliminary layer portions 110 c. Each of theplurality of preliminary layer portions 110 c is to become any one ofthe layer portions 10 included in the main body 2. The substructure 110is cut along the scribe lines 102A and 102B shown in FIG. 9. In thesubstructure 110, each of the plurality of preliminary layer portions110 c is therefore a portion surrounded by two adjacent scribe lines102A and two adjacent scribe lines 102B.

Reference is made to FIG. 22 and FIG. 23 to describe an example of thelayout of the terminals 34 and the electrodes 32 in the firstsubstructure 110 and the layout of the terminals 34 and the electrodes32 in the second substructure 110. FIG. 22 shows the terminals 34 andthe electrodes 32 of the first substructure 110 as seen from the firstsurface 110 a of the first substructure 110. FIG. 23 shows the terminals34 and the electrodes 32 of the second substructure 110 as seen from thesecond surface 110 b of the second substructure 110. The substructures110 will be cut later along the scribe lines 102A shown in FIG. 22 andFIG. 23, and this will form the end face of each of the electrodes 32located at one of the side surfaces of the main body 2.

Each of the semiconductor chips 30 included in the first substructure110 shown in FIG. 22 will be hereinafter called a first semiconductorchip 30. Each of the semiconductor chips 30 included in the secondsubstructure 110 shown in FIG. 23 will be hereinafter called a secondsemiconductor chip 30.

As shown in FIG. 22, the first semiconductor chip 30 includes aplurality of first terminals 34 aligned in a predetermined order. Here,among the plurality of first terminals 34, attention is focused on nineterminals aligned along one side of the first surface 30 a of thesemiconductor chip 30, as shown in FIG. 22. In FIG. 22 the nineterminals are indicated with reference characters A to I. In the firstsemiconductor chip 30, the terminals A to I are aligned in a row in theorder of A to I in the direction from left to right in FIG. 22.

The second semiconductor chip 30 shown in FIG. 23 includes a pluralityof second terminals 34 aligned in a predetermined order incorrespondence with the first terminals 34 of the first semiconductorchip 30 of FIG. 22. In particular, the second semiconductor chip 30includes terminals A to I that respectively correspond to the terminalsA to I of the first semiconductor chip 30 and that are aligned similarlyto the terminals A to I of the first semiconductor chip 30. As seen fromthe first surface 30 a of the semiconductor chip 30, the order in whichthe terminals A to I are aligned is the same between the first andsecond semiconductor chips 30. However, under the condition in which thefirst and second semiconductor chips 30 are positioned such that theirrespective first surfaces 30 a face toward each other, as seen in onedirection, such as in the direction from the second surface 30 b of thesecond semiconductor chip 30, the order in which the terminals A to I ofthe second semiconductor chip 30 are aligned is the reverse of the orderin which the terminals A to I of the first semiconductor chip 30 arealigned, as shown in FIG. 22 and FIG. 23.

Here, among the end faces of the plurality of electrodes 32 to be formedlater at the positions of the scribe lines 102A shown in FIG. 22 andFIG. 23, those corresponding to the terminals A to I of thesemiconductor chip 30 are also indicated with reference characters A toI. In the first substructure 110, as seen in one direction, the endfaces A to I of the electrodes 32 to be formed at the positions of thescribe lines 102A are aligned in the same order as the order in whichthe corresponding terminals A to I are aligned, as shown in FIG. 22. Inother words, the plurality of electrodes 32 of the first substructure110 are formed in such a pattern that the order in which the end faces Ato I of the electrodes 32 are aligned is the same as the order in whichthe corresponding terminals A to I are aligned.

In contrast, in the second substructure 110, as seen in one direction,the end faces A to I of the electrodes 32 to be formed at the positionsof the scribe lines 102A are aligned in the reverse order to the orderin which the corresponding terminals A to I are aligned, as shown inFIG. 23. In other words, the plurality of electrodes 32 of the secondsubstructure 110 are formed in such a pattern that the order in whichthe end faces A to I of the electrodes 32 are aligned is the reverse ofthe order in which the corresponding terminals A to I are aligned.

In the layered chip package 1 fabricated by using the layeredsubstructure 114 including the first and second substructures 110 shownin FIG. 22 and FIG. 23, as seen in one direction, the order in which theterminals A to I of the second semiconductor chip 30 are aligned is thereverse of the order in which the terminals A to I of the firstsemiconductor chip 30 are aligned. The end faces of electrodes 32 thatare located at one side surface of the main body 2 and connected to theterminals A to I of the first semiconductor chip 30 are aligned in thesame order as the order in which the corresponding terminals A to I arealigned, whereas the end faces of electrodes 32 that are located at oneside surface of the main body 2 and connected to the terminals A to I ofthe second semiconductor chip 30 are aligned in the reverse order to theorder in which the corresponding terminals A to I are aligned. As aresult, at one side surface of the main body 2, the end faces ofelectrodes 32 that are connected to the terminals A to I of the firstsemiconductor chip 30 and the end faces of electrodes 32 that areconnected to the terminals A to I of the second semiconductor chip 30are aligned in the same order.

A case will now be considered where, in a pair of layer portions 10Pincluded in the layered chip package 1, the first and secondsemiconductor chips 30 having the terminals 34 aligned in the samemanner are positioned such that the respective first surfaces 30 a facetoward each other and corresponding terminals 34 of the first and secondsemiconductor chips 30 are connected to each other. In this case,according to the example of the layouts of the terminals 34 and theelectrodes 32 of the first and second substructures 110 shown in FIG. 22and FIG. 23, the end faces of electrodes 32 that are connected to theterminals 34 of the first semiconductor chip 30 and the end faces ofelectrodes 32 that are connected to the terminals 34 of the secondsemiconductor chip 30 are aligned in the same order at one side surfaceof the main body 2. This makes it possible to easily connect thecorresponding terminals 34 of the first and second semiconductor chips30 to each other through the wiring 3.

While the foregoing description has been made concerning the terminals34 aligned along one side of the first surface 30 a of the semiconductorchip 30 shown in each of FIG. 22 and FIG. 23 and the electrodes 32connected to those terminals 34, the same applies to other terminals 34aligned along the opposite side to the foregoing side and electrodes 32connected to those terminals 34.

The step of fabricating the pre-main-body stack will now be describedwith reference to FIG. 24 to FIG. 26. Here, a first to a third exampleof the step of fabricating the pre-main-body stack will be described.

FIG. 24 is an illustrative view showing the first example of the step offabricating the pre-main-body stack. According to the first example,first, the layered substructure 114 shown in portion (a) of FIG. 24 iscut into at least one bar 115 shown in portion (b) of FIG. 24. The bar115 includes a plurality of portions 115 a aligned in one directionorthogonal to the stacking direction of the layer portions 10. Each ofthe plurality of portions 115 a is to become any one of the plurality ofpairs of layer portions 10P included in the main body 2. Next, the atleast one bar 115 is cut into a plurality of pairs of layer portions10P, each of the plurality of pairs being intended to become any one ofthe plurality of pairs of layer portions 10P included in the main body2. Portion (c) of FIG. 24 shows one pair of layer portions 10P. Next, apredetermined two or greater number (in the present embodiment, four) ofpairs of layer portions 10P are stacked and every vertically adjacentpairs of layer portions 10P are bonded to each other. The pre-main-bodystack 118 shown in portion (d) of FIG. 24 is thereby completed.

FIG. 25 is an illustrative view showing the second example of the stepof fabricating the pre-main-body stack. According to the second example,first, the layered substructure 114 shown in portion (a) of FIG. 25 iscut into at least one bar 115 shown in portion (b) of FIG. 25. Next, asshown in portion (c) of FIG. 25, two or more bars 115 as many as thepredetermined two or greater number (in the present embodiment, four)are stacked and every vertically adjacent bars 115 are bonded to eachother to thereby fabricate a bar stack 116. The bar stack 116 includes aplurality of portions 116 a aligned in one direction orthogonal to thestacking direction of the layer portions 10. Each of the plurality ofportions 116 a is to become the pre-main-body stack 118. Next, as shownin portion (d) of FIG. 25, the pre-main body stack 118 is completed bycutting the bar stack 116.

FIG. 26 is an illustrative view showing the third example of the step offabricating the pre-main-body stack. According to the third example,first, a number of layered substructures 114 shown in portion (a) ofFIG. 26 as many as the predetermined two or greater number (in thepresent embodiment, four) are stacked and every vertically adjacentlayered substructures 114 are bonded to each other to thereby fabricatea stack aggregate 117 as shown in portion (b) of FIG. 26. The stackaggregate 117 includes a plurality of portions each of which is tobecome the pre-main-body stack 118. The plurality of portions arealigned in two directions orthogonal to the stacking direction of thelayer portions 10. Next, the stack aggregate 117 is cut into the barstack 116 as shown in portion (c) of FIG. 26. Next, as shown in portion(d) of FIG. 26, the pre-main-body stack 118 is completed by cutting thebar stack 116.

The terminal layer 20 is stacked on and bonded to the pre-main-bodystack 118 fabricated through any of the first to third examples. Thisstep is the step of forming the plurality of terminals 22. The terminallayer 20 is formed by, for example, cutting a terminal wafer 120 shownin FIG. 27. The terminal wafer 120 has a wafer main body 121 that isplate-shaped and formed of an insulating material such as a resin orceramic. The wafer main body 121 includes a plurality ofpre-terminal-layer-body portions 21P that will be separated from eachother later to thereby become the terminal layer main bodies 21. Theterminal wafer 120 further includes a plurality of groups of pad-shapedterminals 22 disposed on the top surface of the wafer main body 121. Oneeach group of pad-shaped terminals 22 is disposed in eachpre-terminal-layer-body portion 21P. At the boundaries between every twoadjacent pre-terminal-layer-body portions 21P, pad-shaped terminals 22disposed in one of the two adjacent pre-terminal-layer-body portions 21Pmay be either coupled or non-coupled to those disposed in the other ofthe two adjacent pre-terminal-layer-body portions 21P. The wafer mainbody 121 may be transparent. In this case, alignment marks may beprovided on the top surface of the wafer main body 121 at the positionsof the boundaries between every two adjacent pre-terminal-layer-bodyportions 21P.

In the second example of the step of fabricating the pre-main-body stackshown in FIG. 25, the terminal wafer 120 may be cut into a terminal barin which a plurality of portions to become the terminal layers 20 arealigned in one direction, and this terminal bar may be bonded onto thebar stack 116 shown in portion (c) of FIG. 25. In this case, by cuttingthe bar stack 116 with the terminal bar bonded thereonto, it is possibleto form the pre-main-body stack 118 with the terminal layer 20 bondedthereonto.

In the third example of the step of fabricating the pre-main-body stackshown in FIG. 26, the terminal wafer 120 may be bonded onto the stackaggregate 117 shown in portion (b) of FIG. 26. In this case, by cuttingthe stack aggregate 117 with the terminal wafer 120 bonded thereonto, itis possible to form the pre-main-body stack 118 with the terminal layer20 bonded thereonto.

In any of the first to third examples of the step of fabricating thepre-main-body stack, the pre-main-body stack 118 is fabricated by usingthe layered substructure 114 formed by stacking two substructures 110.

The step of fabricating the main body 2 will now be described. In thepresent embodiment, since each substructure 110 is fabricated by usingthe pre-substructure wafer 101 that can include a malfunctioningpre-semiconductor-chip portion 30P as shown in FIG. 13, thepre-main-body stack 118 can include a second-type layer portion 10 whichincludes a defective semiconductor chip 30. The second-type layerportion 10 is identifiable from the information obtained by the wafersort test. In the present embodiment, any pair of two layer portions 10Pboth of which are the second-type layer portions 10 is not used forfabrication of the pre-main-body stack 118. Instead, a specific pair oflayer portions 10PS which consists of a first-type layer portion 10 anda second-type layer portion 10 is used for fabrication of thepre-main-body stack 118. Consequently, the pre-main-body stack 118 caninclude at least one specific pair of layer portions 10PS.

In the step of fabricating the main body 2, first, the number of thespecific pair(s) of layer portions 10PS included in the pre-main-bodystack 118 is identified from the information obtained by the wafer sorttest. When the number of the specific pair(s) of layer portions 10PSincluded in the pre-main-body stack 118 is zero, in other words, whenall of the plurality of pairs of layer portions 10P included in thepre-main-body stack 118 each consist of two first-type layer portions,the structure made up of the pre-main-body stack 118 and the terminallayer 20 bonded thereonto functions as the main body 2. FIG. 28 showssuch a main body 2 made up of the terminal layer 20 and thepre-main-body stack 118 that does not include any specific pair of layerportions 10PS as described above. The wiring 3 is to be formed later forthis main body 2. A layered chip package that does not include anydefective semiconductor chip 30 is thereby completed.

The method of manufacturing a layered chip package according to thepresent embodiment applies for the case where the pre-main-body stack118 includes at least one specific pair of layer portions 10PS. FIG. 29is an illustrative view showing the step of fabricating the main body inthe method of manufacturing the layered chip package according to thepresent embodiment. As shown in FIG. 29, in the method of manufacturingthe layered chip package according to the present embodiment, the mainbody 2 is fabricated by stacking at least one additional first-typelayer portion 10 together with the pre-main-body stack 118, the numberof the at least one additional first-type layer portion 10 being equalto the number of the at least one specific pair of layer portions 10PSincluded in the pre-main-body stack 118. In the present embodiment, inparticular, the main body 2 is fabricated by stacking at least oneadditional specific pair of layer portions 10PS together with thepre-main-body stack 118, the number of the at least one additionalspecific pair of layer portions 10PS being equal to the number of the atleast one specific pair of layer portions 10PS included in thepre-main-body stack 118. The at least one additional specific pair oflayer portions 10PS is formed by cutting the layered substructure 114.

The example shown in FIG. 29 corresponds to the example shown in FIG. 1.Specifically, in the example shown in FIG. 29, the pre-main-body stack118 includes three pairs of layer portions 11P, 12P and 13P in each ofwhich both of the two layer portions 10 are the first-type layerportions 10, and a pair of layer portions 14P that is a specific pair oflayer portions 10PS. In this example, the pre-main-body stack 118 and apair of layer portions 15P, which is an additional specific pair oflayer portions 10PS, are stacked together and bonded to each other tothereby fabricate the main body 2. In this example, among the pluralityof pairs of layer portions 10P included in the main body 2, theadditional specific pair of layer portions 15P is disposed farthest fromthe top surface 2 a of the main body 2 on which the plurality ofterminals 22 are disposed, or in other words, disposed closest to thebottom surface 2 b of the main body 2. In this way, as shown in FIG. 1,the main body 2 including two specific pairs of layer portions 10PS isfabricated.

When the pre-main-body stack 118 includes two or more specific pairs oflayer portions 10PS, the main body 2 is fabricated by stacking two ormore additional specific pairs of layer portions 10PS together with thepre-main-body stack 118, the number of the two or more additionalspecific pairs of layer portions 10PS being equal to the number of thetwo or more specific pairs of layer portions 10PS included in thepre-main-body stack 118. As thus described, according to the presentembodiment, the main body 2 is fabricated by stacking at least oneadditional specific pair of layer portions 10PS together with thepre-main-body stack 118, the number of the at least one additionalspecific pair of layer portions 10PS being equal to the number of the atleast one specific pair of layer portions 10PS included in thepre-main-body stack 118. Consequently, the number of the specific pairsof layer portions 10PS included in the main body 2 is always an evennumber.

FIG. 30 is a perspective view showing a side surface of a layer portion10 included in the main body 2. In the step of fabricating thepre-main-body stack 118 and the step of fabricating an additionalspecific pair of layer portions 10PS, the insulating layers 106 and 111are cut such that the respective cut surfaces are formed along each ofthe direction in which the first groove 104A of FIG. 21 extends and thedirection in which the second groove 104B of FIG. 21 extends. As shownin FIG. 30, the insulating layer 106 becomes an insulating layer 31A bybeing cut. The insulating layer 31A is part of the insulating portion31. In addition, part of the end face 31 a of the insulating portion 31is formed by the cut surface of the insulating layer 106, that is, a cutsurface 31Aa of the insulating layer 31A. The insulating layer 111becomes an insulating layer 31B by being cut. The insulating layer 31Bis another part of the insulating portion 31. In addition, another partof the end face 31 a of the insulating portion 31 is formed by the cutsurface of the insulating layer 111, that is, a cut surface 31Ba of theinsulating layer 31B. By cutting the insulating layers 106 and 111, theend faces 32 a of the plurality of electrodes 32 are exposed from theend face 31 a of the insulating portion 31. The end faces 32 a aresurrounded by the insulating portion 31.

A description will now be given of the step of completing the layeredchip package 1 by forming the wiring 3 on the main body 2. In this step,first, polishing is performed on the two side surfaces of the main body2 at which the end faces 32 a of the electrodes 32 appear. Next, wiring3A, 3B is formed on the main body 2.

The step of completing the layered chip package 1 may be performed for aplurality of main bodies 2 simultaneously in the following manner, forexample. In this example, first, as shown in FIG. 31, a plurality ofmain bodies 2 are aligned using, e.g., a chip bonding apparatus, suchthat the respective side surfaces on which the wiring 3A is to be formedface upward. At this time, the plurality of main bodies 2 thus alignedmay be fixed by being bonded to each other such that they are separableeasily. Next, the respective side surfaces of the plurality of mainbodies 2 on which the wiring 3A is to be formed are polishedsimultaneously. Next, the wiring 3A is formed on the respective sidesurfaces of the plurality of main bodies 2 on which the wiring 3A is tobe formed. Next, the plurality of main bodies 2 are aligned such thatthe respective side surfaces on which the wiring 3B is to be formed faceupward. Then, the respective side surfaces of the plurality of mainbodies 2 on which the wiring 3B is to be formed are polishedsimultaneously, and the wiring 3B is formed on these respective sidesurfaces.

When aligning the plurality of main bodies 2, it is possible torecognize and control the position of each main body 2 by recognizingthe position of an edge of each main body 2 and/or the positions of theend faces 32 a of the electrodes 32 that appear at the side surface ofeach main body 2 through the use of an image recognizer included in thechip bonding apparatus.

The wiring 3A, 3B is formed by frame plating, for example. In this case,first, a seed layer for plating is formed on the side surface of themain body 2 on which the wiring 3A is to be formed. Next, a frame havinggrooves is formed on the seed layer. The frame is formed by patterning aphotoresist film by photolithography, for example. Next, plating layersto become part of the wiring 3A are formed by plating on the seed layerin the grooves of the frame. Next, the frame is removed and the seedlayer except portions thereof located below the plating layers isremoved by etching. As a result, the wiring 3A is formed of the platinglayers and the portions of the seed layer remaining therebelow. Next,the wiring 3B is formed in the same way as the wiring 3A on the sidesurface of the main body 2 on which the wiring 3B is to be formed.

The layered chip package 1 is completed in the above-described manner.FIG. 32 shows a layered chip package 1 manufactured by forming thewiring 3 on a main body 2 that does not include any specific pair oflayer portions 10PS as shown in FIG. 28. Forming the wiring 3 on a mainbody 2 fabricated through the step of FIG. 29 produces a layered chippackage 1 that includes specific pairs of layer portions 14P and 15P, asshown in FIG. 1 and FIG. 2.

In the second and third examples of the step of fabricating thepre-main-body stack shown in FIG. 25 and FIG. 26, the bar stack 116shown in portion (c) of each of FIG. 25 and FIG. 26 may be subjected topolishing of the two side surfaces of each portion 116 a at which theend faces 32 a of the electrodes 32 appear. In this case, for theadditional specific pair(s) of layer portions 10PS to be later stackedtogether with the pre-main-body stack 118, polishing of the two sidesurfaces at which the end faces 32 a of the electrodes 32 appear isperformed before stacking the additional specific pair(s) of layerportions together with the pre-main-body stack 118.

The layered chip package 1 according to the present embodiment is usableas it is as a single electronic component. For example, the layered chippackage 1 can be mounted on a wiring board by a flip-chip technique byplacing the layered chip package 1 on the wiring board such that theplurality of the plurality of pad-shaped terminals 22 face downward.

For example, if a device for use with the layered chip package 1 has arecessed portion to accommodate the layered chip package 1, the layeredchip package 1 can be inserted to the recessed portion such that theplurality of pad-shaped terminals 22 face upward. It is thereby possibleto connect the pad-shaped terminals 22 to circuits in the device.

FIG. 33 shows an example of use of the layered chip package 1. In thisexample, a plurality of bonding wires 160 are connected at theirrespective one ends to the plurality of pad-shaped terminals 22 of thelayered chip package 1. The respective other ends of the plurality ofbonding wires 160 are connected to terminals of a device for use withthe layered chip package 1.

FIG. 34 and FIG. 35 show other examples of use of the layered chippackage 1. In each of these examples, the layered chip package 1 ismounted to a lead frame having a plurality of pins 161 and is sealedwith a molded resin. The plurality of pad-shaped terminals 22 of thelayered chip package 1 are connected to the plurality of pins 161. Themolded resin forms a protection layer 162 for protecting the layeredchip package 1. FIG. 34 shows an example in which the plurality of pins161 extend horizontally. FIG. 35 shows an example in which the pluralityof pins 161 are folded downward.

In the example shown in FIG. 1 and FIG. 2, among the plurality of pairsof layer portions 10P included in the main body 2, one of the additionalspecific pairs of layer portions 10PS (the pair of layer portions 15P)is disposed closest to the bottom surface 2 b of the main body 2.Alternatively, among the plurality of pairs of layer portions 10Pincluded in the main body 2, one of the additional specific pairs oflayer portions 10PS may be disposed closest to the top surface 2 a ofthe main body 2, in other words, may be disposed below the terminallayer 20.

FIG. 36 is a perspective view showing a modification example of thelayered chip package 1 according to the present embodiment. According tothis modification example, the terminal layer 20 is disposed closer tothe bottom surface 2 b of the main body 2 than are the plurality ofpairs of layer portions 10P included in the main body 2. In thismodification example, among the plurality of pairs of layer portions 10Pincluded in the main body 2, one of the additional specific pairs oflayer portions 10PS may be disposed farthest from the surface of themain body 2 on which the plurality of terminals 22 are disposed, inother words, closest to the top surface 2 a of the main body 2, or maybe disposed closest to the bottom surface 2 b of the main body 2, inother words, may be disposed on the terminal layer 20.

As described so far, according to the present embodiment, it is possibleto provide a layered chip package 1 that includes a plurality of chips30 stacked and that is capable of achieving higher integration. Thelayered chip package 1 according to the present embodiment includes themain body 2 having the top surface 2 a, the bottom surface 2 b and thefour side surfaces 2 c, 2 d, 2 e and 2 f, and wiring 3 disposed on atleast one of the side surfaces of the main body 2. The main body 2includes at least nine layer portions 10 stacked. The plurality of layerportions 10 included in the main body 2 include a plurality of pairs oflayer portions 10P stacked. In the present embodiment, in particular,the plurality of layer portions 10 included in the main body 2 are allin pairs of layer portions 10P. Therefore, in the present embodiment,the main body 2 includes at least five pairs of layer portions 10P.

The plurality of layer portions 10 included in the main body 2 include aplurality of first-type layer portions 10 and at least one second-typelayer portion 10. In the present embodiment, in particular, the numberof the first-type layer portions 10 included in the main body 2 iseight. The plurality of pairs of layer portions 10P included in the mainbody 2 include a plurality of specific pairs of layer portions 10PS,each of the specific pairs of layer portions 10PS consisting of onefirst-type layer portion 10 and one second-type layer portion 10. In thepresent embodiment, in particular, the number of the specific pairs oflayer portions 10PS included in the main body 2 is an even number.

Each of the first-type layer portion 10 and the second-type layerportion 10 includes a semiconductor chip 30, and an insulating portion31 covering at least one of the four side surfaces of the semiconductorchip 30. The insulating portion 31 has at least one end face 31 alocated at the at least one of the side surfaces of the main body 2 onwhich the wiring 3 is disposed.

The semiconductor chip 30 included in the first-type layer portion 10 isa non-defective one whereas the semiconductor chip 30 included in thesecond-type layer portion 10 is a defective one. The first-type layerportion 10 further includes a plurality of electrodes 32 each of whichis connected to the semiconductor chip 30 and each of which has an endface 32 a located at the at least one of the side surfaces of the mainbody 2 on which the wiring 3 is disposed, whereas the second-type layerportion 10 does not include any electrode connected to the semiconductorchip 30 and having an end face located at the at least one of the sidesurfaces of the main body 2 on which the wiring 3 is disposed. The endface 32 a of each of the plurality of electrodes 32 is surrounded by theinsulating portion 31. The wiring 3 is connected to the end faces 32 aof the plurality of electrodes 32.

The method of manufacturing the layered chip package 1 according to thepresent embodiment includes the steps of: fabricating the layeredsubstructure 114 by stacking two substructures 110 each of whichincludes a plurality of preliminary layer portions 110 c aligned, eachof the preliminary layer portions 110 c being intended to become any oneof the layer portions 10 included in the main body 2, the substructures110 being intended to be cut later at a boundary between every adjacenttwo of the preliminary layer portions 110 c; fabricating a pre-main-bodystack 118 by using the layered substructure 114, the pre-main-body stack118 being a stack of a predetermined two or greater number of pairs oflayer portions 10P including at least one specific pair of layerportions 10PS; fabricating the main body 2 by stacking at least oneadditional specific pair of layer portions 10PS together with thepre-main-body stack 118, the number of the at least one additionalspecific pair of layer portions 10PS being equal to the number of the atleast one specific pair of layer portions 10PS included in thepre-main-body stack 118; and completing the layered chip package 1 byforming the wiring 3 on the main body 2. In the present embodiment, inparticular, the predetermined two or greater number mentioned above isfour.

The step of fabricating the layered substructure 114 includes, as aseries steps for fabricating each substructure 110, the step offabricating a pre-substructure wafer 101 including a plurality ofpre-semiconductor-chip portions 30P aligned; the step of distinguishingbetween a normally functioning pre-semiconductor-chip portion 30P and amalfunctioning pre-semiconductor-chip portion 30P among the plurality ofpre-semiconductor-chip portions 30P included in the pre-substructurewafer 101; and the step of forming the plurality of electrodes 32 so asto be connected to the normally functioning pre-semiconductor-chipportion 30P, without forming any electrode connected to themalfunctioning pre-semiconductor-chip portion 30P and having an end facelocated at the at least one of the side surfaces of the main body 2 onwhich the wiring 3 is disposed.

In the layered chip package 1 according to the present embodiment, thesecond-type layer portion 10 which includes a defective semiconductorchip 30 does not have any electrode connected to the semiconductor chip30 and having an end face located at the at least one of the sidesurfaces of the main body 2 on which the wiring 3 is disposed.Therefore, the use of the defective semiconductor chip 30 is disabled.

If a layer portion 10 including a defective semiconductor chip 30 has anelectrode connected to the semiconductor chip 30 and having an end facelocated at the at least one of the side surfaces of the main body 2 onwhich the wiring 3 is disposed, this electrode is connected to thewiring 3. In this case, the electrode connected to the defectivesemiconductor chip 30 generates a capacitance or inductance that isunwanted for a device implemented through the use of the layered chippackage 1, such as a memory device, and/or generates a stray capacitancebetween itself and an electrode 32 connected to a non-defectivesemiconductor chip 30. This is a hindrance to increasing the operationspeed of the device such as a memory device.

In contrast, according to the present embodiment, as described above,the second-type layer portion 10 which includes a defectivesemiconductor chip 30 does not have any electrode connected to thesemiconductor chip 30 and having an end face located at the at least oneof the side surfaces of the main body 2 on which the wiring 3 isdisposed. Therefore, in the layered chip package 1, the second-typelayer portion 10 which includes a defective semiconductor chip 30 can beregarded as merely an insulating layer. The present embodiment thusmakes it possible to disable the use of a defective semiconductor chip30 while reducing problems attributable to wiring connected to thedefective semiconductor chip 30.

In the method of manufacturing the layered chip package according to thepresent embodiment, the layered substructure 114 is used to form thepre-main-body stack 118 which is a stack of a predetermined two orgreater number of pairs of layer portions 10P including at least onespecific pair of layer portions 10PS, and the main body 2 is fabricatedby stacking at least one additional specific pair of layer portions 10PStogether with the pre-main-body stack 118, the number of the at leastone additional specific pair of layer portions 10PS being equal to thenumber of the at least one specific pair of layer portions 10PS includedin the pre-main-body stack 118. For example, assume that thepredetermined two or greater number mentioned above is four. In thiscase, if a pre-main-body stack 118 that does not include any specificpair of layer portions 10PS as shown in FIG. 28 is used to produce alayered chip package 1 that does not include any defective semiconductorchip 30, then the number of the first-type layer portions 10 included inthis layered chip package 1, i.e., the number of non-defectivesemiconductor chips 30 included in this layered chip package 1, iseight. According to the present embodiment, in the case where thepre-main-body stack 118 includes at least one specific pair of layerportions 10PS, the main body 2 is fabricated by stacking at least oneadditional specific pair of layer portions 10PS together with thepre-main-body stack 118, the number of the at least one additionalspecific pair of layer portions 10PS being equal to the number of the atleast one specific pair of layer portions 10PS included in thepre-main-body stack 118. Therefore, the number of the first-type layerportions 10 included in the layered chip package 1 manufactured by thismethod, i.e., the number of non-defective semiconductor chips 30included in this layered chip package 1, is eight, as in the case of alayered chip package 1 that does not include any defective semiconductorchip 30. Thus, the present embodiment make it possible to implement alayered chip package 1 that performs equally well irrespective ofwhether a defective semiconductor chip 30 is included or not.

Furthermore, according to the present embodiment, it is possible to makeeffective use of a specific pair of layer portions 10PS which includesone defective semiconductor chip 30, without discarding it. The presentembodiment thus makes it possible to implement, at low cost, a layeredchip package 1 that performs equally well irrespective of whether adefective semiconductor chip 30 is included or not.

According to the present embodiment, in the case where each of theplurality of semiconductor chips 30 included in the layered chip package1 is a memory chip having an N-bit capacity (N is a natural number) andwhere the number of the first-type layer portions 10 included in thelayered chip package 1, i.e., the number of non-defective semiconductorchips 30 included in the layered chip package 1, is eight, it ispossible to implement a memory having an N-byte capacity by using thislayered chip package 1. In this case, it becomes easy to recognize thecapacity of the memory chip and the capacity of the memory implementedby the layered chip package 1. The same effect is obtained when thenumber of the first-type layer portions 10 included in the layered chippackage 1 is a multiple of eight.

If a single substructure 110 is used to fabricate the pre-main-bodystack 118, the substructure 110 is difficult to handle and susceptibleto damage since it is thin. In contrast, according to the presentembodiment, the layered substructure 114 formed by stacking twosubstructures 110 is used to fabricate the pre-main-body stack 118. Thelayered substructure 114 is greater in strength than a singlesubstructure 110. Consequently, the present embodiment facilitateshandling of the substructures 110 and prevents the substructures 110from being damaged.

According to the present embodiment, since the pre-main-body stack 118is fabricated by using the layered substructure 114, it is possible toreduce the number of the stacking operations in the step of fabricatingthe pre-main-body stack 118 in any of the examples shown in FIG. 24 toFIG. 26, compared with the case of fabricating the pre-main-body stack118 by using a single substructure 110. For example, in the case wherethe pre-main-body stack 118 is fabricated by stacking four pairs oflayer portions 10P as in the example shown in FIG. 24, the number of thestacking operations is smaller by half as compared with the case offabricating the pre-main-body stack 118 by stacking eight layer portions10 one by one. Thus, according to the present embodiment, it is possibleto increase productivity of the layered chip package 1 and as a result,it is possible to reduce the cost of the layered chip package 1.

In the present embodiment, the step of fabricating the layeredsubstructure 114 includes the steps of: fabricating the firstpre-substructure wafer 101; fabricating the second pre-substructurewafer 101; fabricating the first pre-polishing substructure 109 by usingthe first pre-substructure wafer 101; fabricating the secondpre-polishing substructure 109 by using the second pre-substructurewafer 101; bonding the first pre-polishing substructure 109 and thesecond pre-polishing substructure 109 to each other such that therespective first surfaces 109 a of the first and second pre-polishingsubstructures 109 face toward each other; and polishing the respectivesecond surfaces 109 b of the first pre-polishing substructure 109 andthe second pre-polishing substructure 109 in the bonded state.

Each of the first and second pre-substructure wafers 101 is fabricatedthrough the step described with reference to FIG. 4. Each of the firstand second pre-polishing substructures 109 is fabricated through thesteps described with reference to FIG. 5 to FIG. 8. Through the step ofpolishing the respective second surfaces 109 b of the firstpre-polishing substructure 109 and the second pre-polishing substructure109 in the bonded state, the layered substructure 114 is obtained. Thelayered substructure 114 is a stack of the first substructure 110 andthe second substructure 110. The first substructure 110 is formed bythinning the first pre-polishing substructure 109 by the polishing, andthe second substructure 110 is formed by thinning the secondpre-polishing substructure 109 by the polishing.

If a single pre-polishing substructure 109 is polished into thesubstructure 110, the substructure 110 becomes difficult to handle andalso becomes susceptible to damage since the substructure 110 is madethin to a thickness of, for example, 30 to 100 μm. In addition, becauseof a difference in thermal expansion coefficient between thesemiconductor chip 30 and the insulating layer 106 in the substructure110, the substructure 110 will become curved as it becomes thin. Thisalso makes it difficult to handle the substructure 110 and makes thesubstructure 110 susceptible to damage.

According to the present embodiment, the first pre-polishingsubstructure 109 and the second pre-polishing substructure 109 arebonded to each other such that their respective first surfaces 109 aface toward each other, and the respective second surfaces 109 b of thefirst pre-polishing substructure 109 and the second pre-polishingsubstructure 109 in the bonded state are polished. This produces thelayered substructure 114 which is a stack of the first substructure 110and the second substructure 110, wherein the first substructure 110 isformed by thinning the first pre-polishing substructure 109 by thepolishing, and the second substructure 110 is formed by thinning thesecond pre-polishing substructure 109 by the polishing. The layeredsubstructure 114 is greater in strength than a single substructure 110.Consequently, the present embodiment facilitates handling of the firstand second substructures 110 and makes the first and secondsubstructures 110 resistant to damage.

The present embodiment provides the layered substructure 114 made up ofthe first and second substructures 110 that are bonded to each othersuch that their respective first surfaces 110 a face toward each other.When a stress that acts to curve a single substructure 110 is present ineach of the first and second substructures 110 by itself, the presentembodiment makes it possible to cancel out such stresses of the firstand second substructures 110. Consequently, it is possible to maintainthe flatness of the first and second substructures 110.

According to the present embodiment, the plurality of semiconductorchips 30 stacked are electrically connected through the wiring 3disposed on at least one of the side surfaces of the main body 2.Consequently, the present embodiment is free from the problems of thewire bonding method, that is, the problem that it is difficult to reducethe distance between electrodes so as to avoid contact between wires,and the problem that high resistances of the wires hamper a high-speedoperation of a circuit.

Compared with the through electrode method, the present embodiment hasthe following advantages. First, the present embodiment does not requireformation of through electrodes in each chip and consequently does notrequire a large number of steps for forming through electrodes in eachchip.

According to the present embodiment, electrical connection between theplurality of semiconductor chips 30 is established through the wiring 3disposed on at least one of the side surfaces of the main body 2. Thepresent embodiment thus provides higher reliability of electricalconnection between chips as compared with the case of using throughelectrodes to establish electrical connection between chips.

Furthermore, according to the present embodiment, it is possible toeasily change the line width and thickness of the wiring 3.Consequently, it is possible to respond to future demands for finerwiring 3.

The through electrode method requires that the through electrodes ofupper and lower chips be connected to each other by means of, forexample, soldering at high temperatures. In contrast, according to thepresent embodiment, it is possible to form the wiring 3 at lowertemperatures because the wiring 3 can be formed by plating. According tothe present embodiment, it is also possible to perform bonding of theplurality of layer portions 10 at low temperatures. Consequently, it ispossible to prevent the chips 30 from suffering damage from heat.

The through electrode method further requires that upper and lower chipsbe accurately aligned for connecting the through electrodes of the upperand lower chips to each other. In contrast, according to the presentembodiment, electrical connection between the semiconductor chips 30 isperformed not at an interface between every vertically adjacent two ofthe layer portions 10 but through the use of the wiring 3 disposed on atleast one of the side surfaces of the main body 2. The accuracy requiredfor alignment of the plurality of layer portions 10 is therefore lowerthan that required for alignment of a plurality of chips in the throughelectrode method.

The method of manufacturing the layered chip package according to thepresent embodiment allows a reduction in the number of steps andconsequently allows a reduction in cost for the layered chip package,compared with the method of manufacturing a layered chip packagedisclosed in U.S. Pat. No. 5,953,588.

From the foregoing, the present embodiment makes it possible tomass-produce the layered chip package 1 at low cost in a short period oftime.

Furthermore, the method of manufacturing the layered chip package 1according to the present embodiment makes it possible to easily reducethe thicknesses of two substructures 110 that constitute the layeredsubstructure 114 while preventing damage to the two substructures 110.The present embodiment thus allows a high-yield manufacture of thelayered chip package 1 that achieves a reduction in size and a highlevel of integration.

In the present embodiment, the layered substructure 114 can befabricated by a method other than the method described with reference toFIG. 5 to FIG. 21. For example, the layered substructure 114 can befabricated by the following method. First, the first pre-polishingsubstructure 109 is bonded to a jig such that the first surface 109 a ofthe first pre-polishing substructure 109 faces the jig. Next, the secondsurface 109 b of the first pre-polishing substructure 109 bonded to thejig is polished so that the first pre-polishing substructure 109 isthinned by the polishing and thereby the first substructure 110 isformed in the state of being bonded to the jig. Next, the secondpre-polishing substructure 109 is bonded to the first substructure 110such that the first surface 109 a of the second pre-polishingsubstructure 109 faces the polished surface of the first substructure110. Next, the second surface 109 b of the second pre-polishingsubstructure 109 is polished so that the second pre-polishingsubstructure 109 is thinned by the polishing and thereby the secondsubstructure 110 is formed in the state of being stacked on the firstsubstructure 110. This produces the layered substructure 114 in whichthe two substructures 110 are stacked.

Alternatively, the layered substructure 114 may be fabricated by bondingtwo substructures 110 to each other such that their respective secondsurfaces 110 b face toward each other.

Second Embodiment

A layered chip package 1 according to a second embodiment of theinvention and its manufacturing method will now be described. Referenceis now made to FIG. 37 to describe the configuration of the layered chippackage 1 according to the present embodiment. FIG. 37 is a perspectiveview of the layered chip package 1 according to the present embodimentdrawn such that the respective end faces 32Aa of the plurality of firstelectrodes 32A are visible.

The layered chip package 1 according to the present embodiment includeslike the first embodiment, a main body 2 that is in the shape of arectangular solid and that has a top surface 2 a, a bottom surface 2 band first to fourth side surfaces 2 c, 2 d, 2 e and 2 f, and wiring 3disposed on at least one of the side surfaces of the main body 2. In theexample shown in FIG. 37, the layered chip package 1 includes firstwiring 3A disposed on the first side surface 2 c of the main body 2, andsecond wiring 3B disposed on the second side surface 2 d of the mainbody 2. FIG. 37 shows the first side surface 2 c of the main body 2 withthe first wiring 3A shown with broken lines.

The main body 2 includes a plurality of layer portions 10 stacked. Inthe present embodiment, in particular, the main body 2 includes at leastnine layer portions 10. These at least nine layer portions 10 include atleast four pairs of layer portions 10P. In the present embodiment, theplurality of layer portions 10 may include one or more non-paired layerportions 10, in addition to the at least four pairs of layer portions10P.

By way of example, FIG. 37 shows that the main body 2 includes fourpairs of layer portions 11P, 12P, 13P and 14P arranged in this orderfrom the top, and an additional first-type layer portion 16 disposedbelow the pair of layer portions 14P. The pairs of layer portions 11P,12P, 13P and 14P have the same configurations as those of the firstembodiment. The layer portion 16 has the same configuration as that ofone of the layer portions 11A and 11B shown in FIG. 3.

The main body 2 further includes a terminal layer 20 laid on theuppermost layer portion 11A. The terminal layer 20 has the sameconfiguration as that of the first embodiment. Every vertically adjacenttwo pairs of layer portions 10P are bonded to each other with anadhesive, so are the layer portion 16 and the pair of layer portions 14Pto each other, and so are the layer portion 11A and the terminal layer20 to each other.

The plurality of layer portions 10 included in the main body 2 include aplurality of first-type layer portions and at least one second-typelayer portion. In the present embodiment, in particular, the number ofthe first-type layer portions included in the main body 2 is eight. Theplurality of pairs of layer portions 10P included in the main body 2include at least one specific pair of layer portions 10PS, the specificpair of layer portions 10PS consisting of one first-type layer portionand one second-type layer portion.

FIG. 37 shows an example in which one pair of layer portions 14P is thespecific pair of layer portions 10PS. In the pair of layer portions 14P,the layer portion 14A is the first-type layer portion and the layerportion 14B is the second-type layer portion. In the example shown inFIG. 37, among the plurality of layer portions 10 included in the mainbody 2, eight layer portions 10 other than the layer portion 14B are thefirst-type layer portions. FIG. 37 shows an example in which, in thespecific pair of layer portions 14P, the upper layer portion 14A is thefirst-type layer portion and the lower layer portion 14B is thesecond-type layer portion. However, in a specific pair of layer portions10PS, the lower layer portion may be the first-type layer portion andthe upper layer portion may be the second-type layer portion.

Among the at least nine layer portions 10 included in the main body 2,the additional first-type layer potion 16 is disposed farthest from thesurface of the main body 2 on which the plurality of terminals 22 aredisposed, or in other words, disposed closest to the bottom surface 2 bof the main body 2.

Reference is now made to FIG. 38 to describe the method of manufacturingthe layered chip package 1 according to the present embodiment. FIG. 38is an illustrative view showing the step of fabricating the main body 2in the method of manufacturing the layered chip package 1 according tothe present embodiment. In the method of manufacturing the layered chippackage 1 according to the present embodiment, the steps up to the stepof fabricating the pre-main-body stack 118 are the same as those of thefirst embodiment. In the step of fabricating the main body 2 of thepresent embodiment, first, the number of the specific pair(s) of layerportions 10PS included in the pre-main-body stack 118 is identified fromthe information obtained by the wafer sort test. When the number of thespecific pair(s) of layer portions 10PS included in the pre-main-bodystack 118 is zero, in other words, when all of the plurality of pairs oflayer portions 10P included in the pre-main-body stack 118 each consistof two first-type layer portions, the structure made up of thepre-main-body stack 118 and the terminal layer 20 bonded thereontofunctions as the main body 2, as in the first embodiment. Then, thewiring 3 is formed on this main body 2 to thereby fabricate a layeredchip package that does not include any defective semiconductor chip 30.

As shown in FIG. 38, when the pre-main-body stack 118 includes at leastone specific pair of layer portions 10PS, the main body 2 is fabricatedby stacking at least one additional first-type layer portion 10 (16) andthe terminal layer 20 together with the pre-main-body stack 118, thenumber of the at least one additional first-type layer portion 10 beingequal to the number of the at least one specific pair of layer portions10PS included in the pre-main-body stack 118. Then, the wiring 3 isformed on the main body 2 in the same way as the first embodiment, sothat the layered chip package 1 is completed. The additional first-typelayer portion 10 is formed by cutting a single substructure 110.

Reference is now made to FIG. 39 and FIG. 40 to describe an example ofthe method of fabricating the additional first-type layer portion 10.According to this example, as shown in FIG. 39, a pre-polishingsubstructure 109 fabricated in the step shown in FIG. 8 is bonded to ajig 112 with an insulating adhesive such that the first surface 109 a ofthe pre-polishing substructure 109 faces a surface of the jig 112. Aninsulating layer 111 formed by the adhesive covers the electrodes 32 andwill become part of the insulating portion 31. It is preferred that theinsulating layer 111 be transparent.

Next, the second surface 109 b of the pre-polishing substructure 109 ispolished. This polishing is performed until the plurality of grooves 104become exposed. In FIG. 39 the broken line indicates the position of thesurface 109 b after the polishing. As a result of polishing the secondsurface 109 b of the pre-polishing substructure 109, the pre-polishingsubstructure 109 is thinned by the polishing and thereby a substructure110 is formed in the state of being bonded to the jig 112.

FIG. 40 shows the substructure 110 bonded to the jig 112. Thissubstructure 110 has a first surface 110 a corresponding to the firstsurface 109 a of the pre-polishing substructure 109, and a secondsurface 110 b opposite to the first surface 110 a. The second surface110 b is the polished surface.

A plurality of non-paired layer portions 10 are formed by cutting thesubstructure 110 of FIG. 40 along the scribe lines 102A and 102B shownin FIG. 9. Among those plurality of layer portions 10, only thefirst-type layer portions 10 are used as the additional first-type layerportions 10.

In the case of fabricating the main body 2 by stacking two additionalfirst-type layer portions 10 together with the pre-main-body stack 118,the two additional first-type layer portions 10 may be formed by cuttingthe layered substructure 114.

In the present embodiment, among the at least nine layer portions 10included in the main body 2, one of the additional first-type layerportions 10 may be disposed closest to the top surface 2 a of the mainbody 2 on which the plurality of terminals 22 are disposed, or in otherwords, may be disposed below the terminal layer 20.

In the present embodiment, like the modification example of the firstembodiment shown in FIG. 36, the terminal layer 20 may be disposedcloser to the bottom surface 2 b of the main body 2 than are the atleast nine layer portions 10 included in the main body 2. In this case,among the at least nine layer portions 10 included in the main body 2,one of the additional first-type layer portions 10 may be disposedfarthest from the surface of the main body 2 on which the plurality ofterminals 22 are disposed, in other words, closest to the top surface 2a of the main body 2, or may be disposed closest to the bottom surface 2b of the main body 2 closest to the bottom surface 2 b of the main body2 on which the plurality of terminals 22 are disposed, in other words,may be disposed on the terminal layer 20.

The remainder of configuration, function and effects of the presentembodiment are similar to those of the first embodiment, exceptdifferences resulting from the use of at least one additional first-typelayer portion 10 in place of the at least one additional specific pairof layer portions 10PS used in the first embodiment.

Third Embodiment

A layered chip package 1 according to a third embodiment of theinvention and its manufacturing method will now be described. Referenceis now made to FIG. 41 to describe the configuration of the layered chippackage 1 according to the present embodiment. FIG. 41 is a perspectiveview of the layered chip package 1 according to the present embodimentdrawn such that the respective end faces 32Aa of the plurality of firstelectrodes 32A are visible.

The layered chip package 1 according to the present embodiment includes,like the first embodiment, a main body 2 that is in the shape of arectangular solid and that has a top surface 2 a, a bottom surface 2 band first to fourth side surfaces 2 c, 2 d, 2 e and 2 f, and wiring 3disposed on at least one of the side surfaces of the main body 2. In theexample shown in FIG. 41, the layered chip package 1 includes firstwiring 3A disposed on the first side surface 2 c of the main body 2, andsecond wiring 3B disposed on the second side surface 2 d of the mainbody 2. FIG. 41 shows the first side surface 2 c of the main body 2 withthe first wiring 3A shown with broken lines.

The main body 2 includes a plurality of layer portions 10 stacked. Inthe present embodiment, in particular, the main body 2 includes at leastnine layer portions 10. These at least nine layer portions 10 include atleast four pairs of layer portions 10P. In the present embodiment, theplurality of layer portions 10 may include one or more non-paired layerportions 10, in addition to the at least four pairs of layer portions10P.

By way of example, FIG. 41 shows that the main body 2 includes fourpairs of layer portions 11P, 12P, 13P and 14P arranged in this orderfrom the top, and an additional first-type layer portion 17 disposed onthe pair of layer portions 11P. The pairs of layer portions 11P, 12P,13P and 14P have the same configurations as those of the firstembodiment. The layer portion 17 has the same configuration as that ofone of the layer portions 11A and 11B shown in FIG. 3.

The main body 2 further includes a terminal layer 20 laid on theuppermost layer portion 17. The terminal layer 20 has the sameconfiguration as that of the first embodiment. Every vertically adjacenttwo pairs of layer portions 10P are bonded to each other with anadhesive, so are the layer portion 17 and the pair of layer portions 11Pto each other, and so are the layer portion 17 and the terminal layer 20to each other.

The plurality of layer portions 10 included in the main body 2 include aplurality of first-type layer portions and at least one second-typelayer portion. In the present embodiment, in particular, the number ofthe first-type layer portions included in the main body 2 is eight. Theplurality of pairs of layer portions 10P included in the main body 2include at least one specific pair of layer portions 10PS, the specificpair of layer portions 10PS consisting of one first-type layer portionand one second-type layer portion.

FIG. 41 shows an example in which one pair of layer portions 14P is thespecific pair of layer portions 10PS. In the pair of layer portions 14P,the layer portion 14A is the first-type layer portion and the layerportion 14B is the second-type layer portion. In the example shown inFIG. 41, among the plurality of layer portions 10 included in the mainbody 2, eight layer portions 10 other than the layer portion 14B are thefirst-type layer portions. FIG. 41 shows an example in which, in thespecific pair of layer portions 14P, the upper layer portion 14A is thefirst-type layer portion and the lower layer portion 14B is thesecond-type layer portion. However, in a specific pair of layer portions10PS, the lower layer portion may be the first-type layer portion andthe upper layer portion may be the second-type layer portion.

Among the at least nine layer portions 10 included in the main body 2,the additional first-type layer potion 17 is disposed closest to the topsurface 2 a of the main body 2 on which the plurality of terminals 22are disposed, or in other words, disposed below the terminal layer 20.

Reference is now made to FIG. 42 to describe the method of manufacturingthe layered chip package 1 according to the present embodiment. FIG. 42is an illustrative view showing the step of fabricating the main body 2in the method of manufacturing the layered chip package 1 according tothe present embodiment. In the method of manufacturing the layered chippackage 1 according to the present embodiment, the steps up to the stepof fabricating the pre-main-body stack 118 are the same as those of thefirst embodiment. In the step of fabricating the main body 2 of thepresent embodiment, first, the number of the specific pair(s) of layerportions 10PS included in the pre-main-body stack 118 is identified fromthe information obtained by the wafer sort test. When the number of thespecific pair(s) of layer portions 10PS included in the pre-main-bodystack 118 is zero, in other words, when all of the plurality of pairs oflayer portions 10P included in the pre-main-body stack 118 each consistof two first-type layer portions, the structure made up of thepre-main-body stack 118 and the terminal layer 20 bonded thereontofunctions as the main body 2, as in the first embodiment. Then, thewiring 3 is formed on this main body 2 to thereby fabricate a layeredchip package that does not include any defective semiconductor chip 30.

As shown in FIG. 42, when the pre-main-body stack 118 includes at leastone specific pair of layer portions 10PS, the main body 2 is fabricatedby stacking at least one additional first-type layer portion 10 (17) andthe terminal layer 20 together with the pre-main-body stack 118, thenumber of the at least one additional first-type layer portion 10 beingequal to the number of the at least one specific pair of layer portions10PS included in the pre-main-body stack 118. In the present embodiment,in particular, a stack of at least one additional first-type layerportion 10 and the terminal layer 20 is stacked on the pre-main-bodystack 118 to fabricate the main body 2. Thus, according to the presentembodiment, the step of fabricating the main body 2 and the step offorming the plurality of terminals 22 are performed simultaneously bystacking the at least one additional first-type layer portion 10 withthe plurality of terminals 22 integrated therewith as described above,together with the pre-main-body stack 118. Then, the wiring 3 is formedon the main body 2 in the same way as the first embodiment, so that thelayered chip package 1 is completed.

Reference is now made to FIG. 43 to describe an example of the method offabricating the stack of at least one additional first-type layerportion 10 and the terminal layer 20. In this example, at least onesubstructure 110 and the terminal wafer 120 are stacked and bonded toeach other to thereby fabricate a stack of the substructure 110 and theterminal wafer 120 as shown in FIG. 43. Cutting this stack along thescribe lines 102A and 102B shown in FIG. 9 produces a plurality ofstacks of at least one layer portion 10 and the terminal layer 20. Amongthe plurality of stacks of the at least one layer portion 10 and theterminal layer 20, one that does not include any second-type layerportion 10 is used as the stack of at least one additional first-typelayer portion 10 and the terminal layer 20.

FIG. 43 shows a stack of a single substructure 110 and the terminalwafer 120. Cutting this stack produces a stack of one additionalfirst-type layer portion 10 and the terminal layer 20. A singlesubstructure 110 can be fabricated by the method described in the secondembodiment, for example.

A stack of two or more additional first-type layer portions 10 and theterminal layer 20 can be produced by fabricating a stack of two or moresubstructures 110 and the terminal wafer 120 and then cutting thisstack. A stack of two substructures 110 and the terminal wafer 120 maybe produced by stacking the layered substructure 114 and the terminalwafer 120 together.

In the present embodiment, as in the second embodiment, the terminallayer 20 may be disposed closer to the bottom surface 2 b of the mainbody 2 than are the plurality of layer portions 10 included in the mainbody 2, like the modification example of the first embodiment shown inFIG. 36. In this case, among the at least nine layer portions 10included in the main body 2, one of the additional first-type layerportions 10 is disposed closest to the bottom surface 2 b of the mainbody 2 on which the plurality of terminals 22 are disposed, in otherwords, disposed on the terminal layer 20. The remainder ofconfiguration, function and effects of the present embodiment aresimilar to those of the second embodiment.

Fourth Embodiment

A method of manufacturing a layered chip package 1 according to a fourthembodiment of the invention will now be described. The method ofmanufacturing the layered chip package 1 according to the presentembodiment is different from the method of the first embodiment only inthe step of forming the frame 108. First, in the present embodiment, thephotoresist layer used for forming the frame 108 is positive-working.

The exposure step of exposing the photoresist layer for forming theframe 108 of the present embodiment will now be described with referenceto the flow chart of FIG. 44. In the exposure step of the presentembodiment, as in the first embodiment, the photoresist layer is exposedsuch that a latent image corresponding to the plurality of electrodes 32is formed on a portion of the photoresist layer corresponding to anormally functioning pre-semiconductor-chip portion 30P whereas anylatent image corresponding to an electrode connected to a malfunctioningpre-semiconductor-chip portion 30P and having an end face located at theat least one of the side surfaces of the main body 2 on which the wiring3 is disposed is not formed on a portion of the photoresist layercorresponding to the malfunctioning pre-semiconductor-chip portion 30P.In this exposure step, first, among the plurality of the patternprojection regions corresponding to the plurality ofpre-semiconductor-chip portions 30P, a pattern projection regioncorresponding to a first pre-semiconductor-chip portion 30P is selectedto be exposed by the exposure apparatus of FIG. 14 (Step S201). Next,the control device 250 judges whether the pre-semiconductor-chip portion30P corresponding to the selected pattern projection region is anormally functioning one or not (Step S202).

If the pre-semiconductor-chip portion 30P is judged as a normallyfunctioning one (Y) in Step S202, the portion of the photoresist layercorresponding to the normally functioning pre-semiconductor-chip portion30P is exposed in an electrode pattern corresponding to the plurality ofelectrodes 32 through a mask 201 having the electrode pattern (StepS203). Specifically, the electrode pattern of the present embodiment isconfigured to allow light to be applied to the area of the patternprojection region where to form the grooves 108 a to later accommodatethe electrodes 32 and to disallow light to be applied to the remainingarea of the pattern projection region. As a result of this exposure, alatent image corresponding to the plurality of electrodes 32 is formedon the portion of the photoresist layer corresponding to the normallyfunctioning pre-semiconductor-chip portion 30P. To be more specific, inthe portion of the photoresist layer corresponding to a normallyfunctioning pre-semiconductor-chip portion 30P, the area where to formthe grooves 108 a to later accommodate the electrodes 32 becomes solublein the developing solution upon this exposure, while the remaining arearemains insoluble in the developing solution.

If the pre-semiconductor-chip portion 30P is judged as a malfunctioningone (N) in Step S202, the portion of the photoresist layer correspondingto the malfunctioning pre-semiconductor-chip portion 30P is notsubjected to any exposure (Step S204). As a result, any latent imagecorresponding to an electrode connected to the malfunctioningpre-semiconductor-chip portion 30P and having an end face located at theat least one of the side surfaces of the main body 2 on which the wiring3 is disposed is not formed on the portion of the photoresist layercorresponding to the malfunctioning pre-semiconductor-chip portion 30P.Specifically, the entire portion of the photoresist layer correspondingto the malfunctioning pre-semiconductor-chip portion 30P remainsinsoluble in the developing solution. In the case where the second-typelayer portion 10 includes an electrode or wiring other than oneconnected to a defective semiconductor chip 30 and having an end facelocated at the at least one of the side surfaces of the main body 2 onwhich the wiring 3 is disposed, an exposure is performed in Step S204such that a latent image corresponding to such an electrode or wiring isformed, instead of no exposure. In this case also, any latent imagecorresponding to an electrode connected to the malfunctioningpre-semiconductor-chip portion 30P and having an end face located at theat least one of the side surfaces of the main body 2 on which the wiring3 is disposed is not formed on the portion of the photoresist layercorresponding to the malfunctioning pre-semiconductor-chip portion 30P.

After the Step S203 or S204 is performed, the control device 250 judgeswhether the pattern projection region having undergone the Step S203 orS204 is the region corresponding to the last pre-semiconductor-chipportion 30P (Step S205). If the pattern projection region is judged ascorresponding to the last pre-semiconductor-chip portion 30P (Y), theexposure step is finished. If the pattern projection region is judged asnot corresponding to the last pre-semiconductor-chip portion 30P (N), apattern projection region corresponding to a next pre-semiconductor-chipportion 30P is selected to be exposed (Step S206) and the processstarting from Step S202 is repeated.

FIG. 45 is an illustrative view showing the exposure step of FIG. 44.Reference numeral 108P in FIG. 45 indicates the photoresist layer to beused for forming the frame 108. Portions (a), (b), (c) and (d) of FIG.45 indicate regions for which Step S203 or S204 is to be performed. Inthe example of FIG. 45, Step S203 or S204 is performed in the order ofthe regions (a), (b), (c) and (d). For the regions (a), (c) and (d), thecorresponding pre-semiconductor-chip portions 30P have been judged asnormally functioning ones in Step S202 and consequently the portions ofthe photoresist layer 108P corresponding to those normally functioningpre-semiconductor-chip portions 30P are each exposed in the electrodepattern through a mask 201C having the electrode pattern. For the region(b), the corresponding pre-semiconductor-chip portion 30P has beenjudged as a malfunctioning one in Step S202 and consequently the portionof the photoresist layer 108P corresponding to the malfunctioningpre-semiconductor-chip portion 30P is not subjected to any exposure.Portion (e) of FIG. 45 shows the plane geometry of the latent imageformed on the photoresist layer 108P by exposure.

After the exposure step described above, the photoresist layer 108P isdeveloped with a developing solution and the frame 108 is therebyformed. The shape of the frame 108 is the same as that of the firstembodiment.

The remainder of configuration, function and effects of the presentembodiment are similar to those of the first to third embodiments.

Fifth Embodiment

A method of manufacturing a layered chip package 1 according to a fifthembodiment of the invention will now be described. The method ofmanufacturing the layered chip package 1 according to the presentembodiment is different from the method of the first embodiment only inthe step of forming the frame 108. First, in the present embodiment, thephotoresist layer used for forming the frame 108 is negative-working.

In the present embodiment, the step of forming the frame 108 includes: afirst exposure step of exposing all of the plurality of portions of thephotoresist layer corresponding to the plurality of pre-semiconductorchip portions 30P, that is, all of the pattern projection regions, inthe electrode pattern corresponding to the plurality of electrodes 32; asecond exposure step of subjecting only a portion of the photoresistlayer corresponding to a malfunctioning pre-semiconductor-chip portion30P to an overall exposure, the second exposure step being performedbefore or after the first exposure step; and a step of developing thephotoresist layer performed after the first and second exposure steps.

Reference is now made to FIG. 46 and FIG. 47 to describe the case ofperforming the second exposure step after the first exposure step. FIG.46 is an illustrative view showing the first exposure step. FIG. 47 isan illustrative view showing the second exposure step. In FIG. 46 andFIG. 47 reference numeral 108P indicates the photoresist layer to beused for forming the frame 108.

Portions (a), (b), (c) and (d) of FIG. 46 indicate regions to undergoexposure in the electrode pattern in the first exposure step. In thefirst exposure step, all of the plurality of portions of the photoresistlayer 108P corresponding to the plurality of pre-semiconductor chipportions 30P are exposed in the electrode pattern through the mask 201Ahaving the electrode pattern. As a result, a latent image of theelectrode pattern is formed on all of the plurality of portions of thephotoresist layer 108P corresponding to the plurality ofpre-semiconductor chip portions 30P. Portion (e) of FIG. 46 shows theplane geometry of the latent image formed on the photoresist layer 108Pby exposure.

Regions (a), (b), (c) and (d) of FIG. 47 correspond to the regions (a),(b), (c) and (d) of FIG. 46. In the example shown in FIG. 47, thepre-semiconductor-chip portions 30P in the regions (a), (c) and (d) arenormally functioning ones whereas the pre-semiconductor-chip portion 30Pin the region (b) is a malfunctioning one. In the second exposure step,the portion of the photoresist layer 108P corresponding to themalfunctioning pre-semiconductor-chip portion 30P in the region (b) issubjected to an overall exposure. Portion (e) of FIG. 47 shows the planegeometry of the latent image formed on the photoresist layer 108P byexposure.

In the region (b), although the latent image is formed by the firstexposure step as shown in FIG. 46, it disappears by the overall exposureperformed in the second exposure step. As a result, the entire portionof the photoresist layer 108P corresponding to the malfunctioningpre-semiconductor-chip portion 30P becomes insoluble in the developingsolution.

After the first and second exposure steps, the photoresist layer 108P isdeveloped with the developing solution and the frame 108 is therebyformed. The shape of the frame 108 is the same as that of the firstembodiment.

In the present embodiment, the first exposure step may be performedafter the second exposure step. In this case, first, by performing thesecond exposure step, an entire portion of the photoresist layer 108Pcorresponding to a malfunctioning pre-semiconductor-chip portion 30Pbecomes insoluble in the developing solution. Then, by performing thefirst exposure step, a latent image of the electrode pattern is formedon a portion of the photoresist layer 108P corresponding to a normallyfunctioning pre-semiconductor chip portion 30P. At this time, althoughthe portion of the photoresist layer corresponding to the malfunctioningpre-semiconductor-chip portion 30P is also exposed, the whole of thisportion has already become insoluble in the developing solution throughthe overall exposure. There is no difference in the resulting frame 108between the case where the first exposure step is performed after thesecond exposure step and the case where the second exposure step isperformed after the first exposure step.

According to the present embodiment, since there is no need to replacethe mask 201 during each of the first exposure step and the secondexposure step, each of the first and second exposure steps can becompleted in a short period of time. In the first exposure step, inparticular, since all of the pattern projection regions are to beexposed in the same electrode pattern, two or more, such as four to six,of the pattern projection regions can be simultaneously exposed using astepper. In the first exposure step, for example, use of a contactaligner or a projection aligner in place of the stepper allows exposingall of the pattern projection regions simultaneously. Exposing aplurality of pattern projection regions simultaneously in the firstexposure step as described above reduces the time required for the firstexposure step. From the foregoing, compared with the first and secondembodiments, the present embodiment serves to shorten the time requiredfor the process of exposing the photoresist layer 108P for forming theframe 108, and thereby serves to increase productivity.

The remainder of configuration, function and effects of the presentembodiment are similar to those of the first to third embodiments.

The present invention is not limited to the foregoing embodiments butcan be carried out in various modifications. For example, the terminallayer 20 may be eliminated from the main body 2 of the layered chippackage 1 and part of the wiring 3 may also function as externalconnecting terminals.

It is apparent that the present invention can be carried out in variousforms and modifications in the light of the foregoing descriptions.Accordingly, within the scope of the following claims and equivalentsthereof, the present invention can be carried out in forms other thanthe foregoing most preferred embodiments.

1. A method of manufacturing a layered chip package, the layered chippackage comprising: a main body having a top surface, a bottom surfaceand four side surfaces; and wiring disposed on at least one of the fourside surfaces of the main body, wherein: the main body includes pairs oflayer portions, the pairs of layer portions being stacked, each of thepairs of layer portions consisting of two layer portions that arestacked; the pairs of layer portions include at least one specific pairof layer portions, the at least one specific pair of layer portionsconsisting of a first-type layer portion and a second-type layerportion; each of the first-type layer portion and the second-type layerportion includes a semiconductor chip; the semiconductor chip includedin the first-type layer portion is non-malfunctioning, whereas thesemiconductor chip included in the second-type layer portion ismalfunctioning; the first-type layer portion further includeselectrodes, each of the electrodes being connected to the semiconductorchip of the first-type layer portion and having an end face located atthe at least one of the four side surfaces of the main body on which thewiring is disposed, whereas the second-type layer portion does notinclude any electrode being connected to the semiconductor chip of thesecond-type layer portion and having an end face located at the at leastone of the four side surfaces of the main body on which the wiring isdisposed; and the wiring is connected to the end face of each of theelectrodes of the first-type layer portion, the method comprising thesteps of: fabricating a layered substructure by stacking twosubstructures each of which includes preliminary layer portions that arealigned, each of the preliminary layer portions being intended to becomeany one of the layer portions included in the main body, the twosubstructures being intended to be cut later at a boundary between everyadjacent two of the preliminary layer portions; fabricating apre-main-body stack by using the layered substructure, the pre-main-bodystack being a stack of a predetermined two or greater number of pairs oflayer portions including the at least one specific pair of layerportions; fabricating the main body by stacking at least one additionalfirst-type layer portion together with the pre-main-body stack, the atleast one additional first-type layer portion being equal in number tothe at least one specific pair of layer portions included in thepre-main-body stack; and completing the layered chip package by formingthe wiring on the main body, wherein the step of fabricating the layeredsubstructure includes the following steps for fabricating eachsubstructure: a step of fabricating a pre-substructure wafer, thepre-substructure wafer including pre-semiconductor-chip portions thatare aligned; a step of distinguishing between a non-malfunctioningpre-semiconductor-chip portion and a malfunctioningpre-semiconductor-chip portion among the pre-semiconductor-chip portionsincluded in the pre-substructure wafer; and a step of forming theelectrodes so as to be connected to the non-malfunctioningpre-semiconductor-chip portions, without forming any electrode beingconnected to the malfunctioning pre-semiconductor-chip portions andhaving an end face located at the at least one of the four side surfacesof the main body on which the wiring is disposed.
 2. The method ofmanufacturing the layered chip package according to claim 1, wherein thepredetermined two or greater number is four.
 3. The method ofmanufacturing the layered chip package according to claim 1, wherein:the semiconductor chip of each of the first-type and second-type layerportions has four side surfaces; each of the first-type layer portionand the second-type layer portion further includes an insulating portioncovering at least one of the four side surfaces of the semiconductorchip; the insulating portion has at least one end face located at the atleast one of the four side surfaces of the main body on which the wiringis disposed; and the end face of each of the electrodes is surrounded bythe insulating portion.
 4. The method of manufacturing the layered chippackage according to claim 1, wherein, in the step of fabricating themain body, the main body is fabricated by stacking at least oneadditional specific pair of layer portions together with thepre-main-body stack, the at least one additional specific pair of layerportions being equal in number to the at least one specific pair oflayer portions included in the pre-main-body stack.
 5. The method ofmanufacturing the layered chip package according to claim 4, wherein, inthe step of fabricating the main body, one of the at least oneadditional specific pair of layer portions stacked with thepre-main-body stack is disposed closest to the top surface or the bottomsurface of the main body among the pairs of layer portions included inthe main body.
 6. The method of manufacturing the layered chip packageaccording to claim 4, wherein the layered chip package further comprisesterminals disposed on one of the top surface and the bottom surface ofthe main body, and the wiring is connected to the terminals, the methodfurther comprising a step of forming the terminals performed before thestep of completing the layered chip package, wherein, in the step offabricating the main body, one of the at least one additional specificpair of layer portions stacked with the pre-main-body stack is disposedfarthest from the surface of the main body on which the terminals aredisposed, among the pairs of layer portions included in the main body.7. The method of manufacturing the layered chip package according toclaim 1, wherein, in the step of fabricating the main body, one of theat least one additional first-type layer portion stacked with thepre-main-body stack is disposed closest to the top surface or the bottomsurface of the main body among the pairs of layer portions included inthe main body.
 8. The method of manufacturing the layered chip packageaccording to claim 1, wherein the layered chip package further comprisesterminals disposed on one of the top surface and the bottom surface ofthe main body, and the wiring is connected to the terminals, the methodfurther comprising a step of forming the terminals performed before thestep of completing the layered chip package, wherein, in the step offabricating the main body, one of the at least one additional first-typelayer portion stacked with the pre-main-body stack is disposed farthestfrom the surface of the main body on which the terminals are disposed,among the pairs of layer portions included in the main body.
 9. Themethod of manufacturing the layered chip package according to claim 1,wherein the layered chip package further comprises terminals disposed onone of the top surface and the bottom surface of the main body, and thewiring is connected to the terminals, the method further comprising thestep of forming the terminals performed before the step of completingthe layered chip package, wherein the step of fabricating the main bodyand the step of forming the terminals are performed simultaneously bystacking the at least one additional first-type layer portion with theterminals integrated therewith, together with the pre-main-body stack.10. The method of manufacturing the layered chip package according toclaim 1, wherein the step of fabricating the pre-main-body stackincludes the steps of: fabricating at least one bar by cutting thelayered substructure, the at least one bar including areas, each ofwhich is to become any one of the pairs of layer portions included inthe main body, the areas being aligned in one direction orthogonal to astacking direction of the pairs of layer portions; cutting the at leastone bar so as to form two or more pairs of layer portions, each of thetwo or more pairs of layer portions being intended to become any one ofthe pairs of layer portions included in the main body; and completingthe pre-main-body stack by stacking the predetermined two or greaternumber of pairs of layer portions.
 11. The method of manufacturing thelayered chip package according to claim 1, wherein the step offabricating the pre-main-body stack includes the steps of: fabricatingbars by cutting the layered substructure, each of the bars includingareas, each of which is to become any one of the pairs of layer portionsincluded in the main body, the areas of each of the bars being alignedin one direction orthogonal to a stacking direction of the pairs oflayer portions; fabricating a bar stack by stacking two or more of thebars in an equal number to the predetermined two or greater number, thebar stack including areas, each of which is to become the pre-main-bodystack, the areas of the bar stack being aligned in one directionorthogonal to the stacking direction of the pairs of layer portions; andcompleting the pre-main-body stack by cutting the bar stack.
 12. Themethod of manufacturing the layered chip package according to claim 1,wherein the step of fabricating the pre-main-body stack includes thesteps of: fabricating a stack aggregate by stacking a number of layeredsubstructures, the number of the layered substructures to be stackedbeing equal to the predetermined two or greater number, the stackaggregate including areas, each of which is to become the pre-main bodystack, the areas of the stack aggregate being aligned in one directionorthogonal to a stacking direction of the pairs of layer portions; andcompleting the pre-main-body stack by cutting the stack aggregate. 13.The method of manufacturing the layered chip package according to claim1, wherein the step of forming the electrodes includes the steps of:forming a photoresist layer for use for forming the electrodes, thephotoresist layer including portions that respectively correspond to allof the pre-semiconductor-chip portions; forming a frame by patterningthe photoresist layer by photolithography, the frame having grooves thatare to later accommodate the electrodes; and forming the electrodes inthe grooves of the frame.
 14. The method of manufacturing the layeredchip package according to claim 13, wherein, in the step of forming theelectrodes in the grooves of the frame, the electrodes are formed byplating.
 15. The method of manufacturing the layered chip packageaccording to claim 13, wherein the step of forming the frame includes:an exposure step of exposing the photoresist layer such that a latentimage corresponding to the electrodes is formed on a portion of thephotoresist layer corresponding to the non-malfunctioningpre-semiconductor-chip portion, whereas any latent image correspondingto an electrode connected to the malfunctioning pre-semiconductor-chipportion and having the end face located at the at least one of the fourside surfaces of the main body on which the wiring is disposed is notformed on a second portion of the photoresist layer corresponding to themalfunctioning pre-semiconductor-chip portion; and a step of developingthe photoresist layer performed after the exposure step.
 16. The methodof manufacturing the layered chip package according to claim 13, whereinthe photoresist layer is negative-working, and the step of forming theframe includes: an exposure step in which a portion of the photoresistlayer corresponding to the non-malfunctioning pre-semiconductor-chipportion is exposed in a pattern corresponding to the electrodes, whereasa second portion of the photoresist layer corresponding to themalfunctioning pre-semiconductor-chip portion is subjected to an overallexposure; and a step of developing the photoresist layer performed afterthe exposure step.
 17. The method of manufacturing the layered chippackage according to claim 13, wherein the photoresist layer ispositive-working, and the step of forming the frame includes: anexposure step in which a portion of the photoresist layer correspondingto the non-malfunctioning pre-semiconductor-chip portion is exposed in apattern corresponding to the electrodes, whereas a second portion of thephotoresist layer corresponding to the malfunctioningpre-semiconductor-chip portion is not subjected to any exposure; and astep of developing the photoresist layer performed after the exposurestep.
 18. The method of manufacturing the layered chip package accordingto claim 13, wherein the photoresist layer is negative-working, and thestep of forming the frame includes: a first exposure step of exposingall of the portions of the photoresist layer in a pattern correspondingto the electrodes; a second exposure step of subjecting only a portionof the photoresist layer corresponding to the malfunctioningpre-semiconductor-chip portion to an overall exposure, the secondexposure step being performed before or after the first exposure step;and a step of developing the photoresist layer performed after the firstand second exposure steps.